Monday, November 6

Room A (Ramada Ballroom 1, 2F)

18:00-20:00 Welcome Reception

Tuesday, November 7

Room A (Ramada Ballroom 1, 2F)

7P-1: Plenary Session I

Cnairs: J. Ahn (Hanyang Univ.) and K. Ishibashi (RIKEN)

7P-1-0 9:30-10:00

Opening Remarks: E.K. Kim (Hanyang Univ.)

Award Presentation: S.H. Choi (Kyung Hee Univ.) and E.K. Kim (Hanyang Univ.), MNC 2016 Outstanding Paper, Most Impressive Presentation, Most Impressive Poster and Young Author's Award

Local Announcement from Committee: J. Ahn (Hanyang Univ.)

7P-1-1  10:00-10:40


S. Salahuddin, Univ. of California, Berkeley, USA

7P-1-2 10:40-11:20

Progress and Perspective of Nano Imprint Lithography for Production in Semiconductor Devices (Plenary)

T. Higashiki, Toshiba Memory, Japan

7P-1-3  11:20-12:00

2D Materials: Crystal Growth for Future Device Structures (Plenary)

L. Colombo, Texas Instruments, USA


Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

7A-2: Nano-Scale Transistors (13:30-15:20)


S. Kim (Samsung Electronics) W.S. Hwang (Korea Aerospace Univ.)

7B-2: Graphene: Materials, Characterization and Applications (13:30-15:50)


J.-H. Ahn (YonseiUniv.)

R. Negishi (Osaka Univ.)

7C-2: Organic Nanomaterials I (13:30-15:30)


T. Sakanoue (Nagoya Univ.)

C. Pang (SKKU)

7D-2: Nanoimprint, Nanoprint and Rising Lithography (13:30-16:00)


S. Kang (Yonsei Univ.)

H. Lee (Korea Univ.)



Impacts of Traps on Nano Scale Device Performance, Reliability, and Novel Applications (Invited)

J. Chen 1, J. Wu 1,2 and X. Jiang 1,2, 1 Shandong Univ. and Chinese Academy of Sci., China



Nanocarbon/Metal Composites for Advanced Electronics Applications (Invited)

S.H. Lee, KIST, Korea



Conductive Stretchable Polymer Composites Useful for Wearable Electronics (Invited)

U. Jeong, POSTECH, Korea



Enhancement of Light Extraction Efficiency in Various Photonic Devices with Imprinted

Nano-Structures (Invited)

Y. Kim and H. Lee, Korea Univ., Korea



Numerical Analysis of Band Tailing and Electron Transport Near Conduction Band Edge in Doped Si Nanowires

T. Tanaka and K. Uchida, Keio Univ., Japan



Electrical and Magnetic Characteristics of Randomly Stacked CVD Graphene

K. Uemura 1, T. Ikuta 1, T. Ono 2, Y. Kanai 2, K. Inoue 2, K. Matsumoto 2, T. Hihara 3 and K. Maehashi 1, 1 Tokyo Univ. of Agriculture and Technol., 2 Osaka Univ. and 3 Nagoya Inst. of Technol., Japan



Prospective Study CT Nanocrystals for Organic Solar Cells (Invited)

A. Masuhara, Yamagata Univ., Japan



Emergent Magnetic Order in Artificial Spin Structures (Invited)

B. Hjörvarsson, Uppsala Univ., Sweden



Single Electron Transistor Characteristics of Fe-MgF2 Single-Layer Granular Films

Y. Asai, S. Honjo, A. Tsurumaki-Fukuchi, M. Arita and Y. Takahashi, Hokkaido Univ., Japan



Field Emission Properties of Edge-Functionalized Graphene Nanoribbon

Y. Gao and S. Okada, Univ. of Tsukuba, Japan



Room Temperature-Operating PbS QD Based Infrared Sensor by Using Bandgap Manipulation

S. Kim and K. Lee, Ajou Univ., Korea



Fabrication of Spatially Aligned Silicon Nanotubes and Palladium Nanogaps and Their Applications (Invited)

Y. Pak, H.S. Jeong, Y. Jeong and G.-Y. Jung, GIST, Korea



Potential and Drain Current Model For L-Shaped Tunnel Field Effect Transistor

F. Najam and Y.S. Yu, Hankyong Natl. Univ., Korea



Fracture Nanomechanics of Graphene (Invited)

T. Kitamura 1 and B. Jang 2, 1 Kyoto Univ., Japan and 2 KIMM, Korea




Novel Core-Shell Type Hybridized Nanoparticles for Polymer Electrolyte Membrane

K. Shito 1, S. Sekine 1, Y. Takahashi 1, T. Arita 2 and A. Masuhara 1, 1 Yamagata Univ. and 2 Tohoku Univ., Japan



Fabrication of Au Split-Ring Resonator Arrays by Reverse-Tone Lithography Using a Print-and Imprint Method

T. Uehara, S. Sato, S. Ito, H. Yano, T. Nakamura and M. Nakagawa, Tohoku Univ., Japan



Study on the Origin of Vth Fluctuation Caused by Ion Implantation to Source and Drain Extensions of SOI Tri-Gate FinFETs by 3D Process and Device Simulations

T. Tsutsumi, Meiji Univ., Japan



Resonance Control of Graphene Mechanical Resonator in Nonlinear Resume by Standing Wave of Light

T. Inoue, Y. Anno, Y. Imakita, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan



Investigation of Lattice Strain Changes in Bandgap Modulated Perovskite Single Crystals

D. Park, H. Byun, A.Y. Lee, H.M. Choi, S.C. Lim and M.S. Jeong, Sungkyunkwan Univ., Korea



Molecular Dynamics Study on Polymer Slipping under Shear Flow in Nanofabrication Processes

K. Tada 1, Y. Miyashita 1, M. Yasuda 2 and Y. Hirai 2, 1 Natl. Inst. of Technol., Toyama College and 2 Osaka Pref. Univ., Japan




Wearable Three Dimensional Capacitive Touch Sensor Based on Graphene

M. Kang and J.-H. Ahn, Yonsei Univ., Korea



Evaluation of Meniscus Behavior under Helium for Rapid Resist Spreading

H. Kashiwagi, N. Sato, M. Hatano, W. Jung, T. Kono and T. Nakasugi, Toshiba Memory, Japan

7A-2 Author's Interview:


7B-2 Author's Interview:


7C-2 Author's Interview:


7D-2 Author's Interview:


Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

7A-3: Advance Nano Memory Devices (15:40-17:40)


W.S. Hwang (Korea Aerospace Univ.)

J. Chen (Shandong Univ.)

7B-3: 2D Materials for Electronic Applications (16:00-18:00)


J. Ando (AIST)

J.-H. Ahn (YonseiUniv.)

7C-3: Organic Nanomaterials II (15:50-17:50)


A. Masuhara (Yamagata Univ.)

U. Jeong (POSTECH)

7D-3: Inorganic Materials I (16:20-17:50)


J.-S. Kim (Yeungnam Univ.)

K. Nakamura (Kyoto Univ.)



ReRAM Switching in Planar-Type Structures of Ag/WOx/Pt Studied by in-Situ TEM

S. Sakai, S. Muto, A. Tsurumaki-Fukuchi, M. Arita and Y. Takahashi, Hokkaido Univ., Japan



Polyelectrolyte-Gated Vertical Schottky-Barrier Transistors  (Invited)

J.H. Cho, Sungkyunkwan Univ., Korea



Bright Polymer Light-Emmitting Electrochemical Cells Based on Ionic Liquids (Invited)

T. Sakanoue, Nagoya Univ., Japan



Spin Transfer Dynamic in III-V Compound Semiconductor Quantum Dots Integrated with Layered Quantum Structures (Invited)

A. Maruyama, Hokkaido Univ., Japan



Resistive Switching Dependence on the Stacking Sequence of IGZO and SnO2 Heterojunction Memory Devices

Y. Abbas 1, A. Ali 2, J. Jongwan 2 and C. Choi 1, 1 Hanyang Univ. and 2 Sejong Univ., Korea



N-GQD Doped WO3 for Electrochromic Devices

A. Hasani, Q.V. Le, T.P. Nguyen and S.Y. Kim, Chung-Ang Univ., Korea



Bioinspired Multiscale Architectures for Skin-Patches and Wearable Devices (Invited)

S.Y. Baik and C. Pang, SKKU, Korea



Radiative Decay Time of Center-of-Mass Exciton Confinement States in a Single CdTe/CdMnTe Quantum Well

W. Lee 1, M. Kim 1, H. Yang 1, K. Kyhm 1, A. Maruyama 2, K. Kheng 3, H. Mariette 3 and L.S. Dang 4, 1 Pusan Natl. Univ., Korea, 2 Hokkaido Univ., Japan, 3 CEA, France and 4 CNRS, France



The Effects of Plasma Irradiation on the Resistive Switching of HfOx-Based RRAM

B. Ku, Y. Abbas and C. Choi, Hanyang Univ., Korea



Diode Characteristics of Graphene-GaN Heterojunction with h-BN Interfacial Layer

G. Kalita, M. Kobayashi, M.D. Shaarin, R. Mahyavanshi and M. Tanemura, Nagoya Inst. of Technol., Japan



Halogen Tuning Effect on Raman Shifts of Hybride Perovskite Single Crystals

A. Lee, D. Park and M.S. Jung, Sungkyunkwan Univ., Korea



Periodically Diameter-Modulated Semiconductor Nanowires for Enhanced Optical Absorption

M. Ko, S.-H. Baek, B. Song, J.-W. Kang and C.-H. Cho, DGIST, Korea



Resistive Switching Parameter Improvement of Pt/HfO2/Pt Resistor by Applying Voltage Bias Polarity

Y.C. Jung, S. Seong, T. Lee, S.Y. Kim, I.-S. Park and J. Ahn, Hanyang Univ., Korea



Van der Waals Heterostructure Based on Two-Dimensional Atomic Crystals (Invited)

Y.-J. Yu, ETRI, Korea




Efficient Polymer Protection for Hybrid MAPbI3 Perovskite Photodetectors

H. Kim, H.R. Byun, B. Kim, S.H. Kim, H.M. Oh and M.S. Jeong, Sungkyunkwan Univ., Korea



Growth Mechanism and Structure Determination of TiSeTe Single Crystals – A New Ternary Phase of Transition Metal Chalcogenides

A.K. Dasadia 1, B.B. Nariaya 2 and A.R. Jani 2, 1 A.D. Patel Inst. of Technol. and 2 Sardar Patel Univ., India



Engineering Digital to Analog Resistive Switching of HfOx-Based RRAM by Inserting TaOy for Synaptic Behavior

S. Kim, Y. Abbas and C. Choi, Hanyang Univ., Korea



Effect of Buffer Layer on Photoresponse of MoS2 Phototransistor

Y. Miyamoto, D. Yoshikawa, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan



Light Soaking Effect in Organic-Inorganic Mixed Halide Perovskite Single Crystals

H.R. Byun 1, D.Y. Park 1, H.M. Oh 1, G. Namkoong 2 and M.S. Jeong 1, 1 Sungkyunkwan Univ. and 2 Old Dominion Univ., USA



Forming-Free Resistive Swithching Characteristics in MnO/Ta2O5 Based Crossbar Array Structure

Q. Hu, T.S. Kang, H. Abbas, T.S. Lee, N.J. Lee, M.R. Park, T.-S. Yoon and C.J. Kang, Myongji Univ., Korea



7A-3 Author's Interview:


7B-3 Author's Interview:


7C-3 Author's Interview:


7D-3 Author's Interview:


Wednesday, November 8

Room A (Ramada Ballroom 1, 2F)

8P-4: Plenary Session II

Chairs: S.H. Choi (Kyung Hee Univ.)

8P-4-1  8:30-9:10

Two-Dimensional van der Waals Layered Heterostructures: Progress and Challenges (Plenary)

Y.H. Lee, Sungkyunkwan Univ., Korea

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

8A-5: Optoelectronic Devices (9:20-10:30)


C.-H. Cho (DGIST)

8B-5: Nanocarbon Characterization (9:20-10:50)


M. Tanemura (Nagoya Inst. of Technol.)

S.Y. Kim (Chung Ang Univ.)

8C-5: Resist and Directed Selef-Assembly I (9:20-10:40)


T. Azuma (EIDEC)

S.-J. Jeong (SAIT)

8D-5: Microsystem Technology and MEMS I (9:20-10:50)


J. Lee  (Sogang Univ.)

S. Nagasawa (Shibaura Inst. of Technol.)



Transparent and Flexible Ultraviolet Photoconductors Using Low Temperature Processes of Multidimensional Nanostructures (Invited)

T.V. Cuong 1,2, K.K. Bok 2, D.T. Thanh 2 and C.-H. Hong 2, 1 Vietnam Natl. Univ., Vietnam and 2 Chonbuk Natl. Univ., Korea



Two Color Two Photon Excited Photoluminescence of Graphene-Rhodamine 6G Conjugated System (Invited)

H. Kim, DGIST, Korea



Next Generation Lithography for Sub-20nm Half Pitch Patterning (Invited)

H.-W. Kim, J. Park, S.S. Yi, S.Y. Woo, S. Yi, C.H. Park, J.Y. Kim and S.M. Park, Samsung Electronics, Korea



The Quest for Next Generation MEMS and Nano-Devices: Nanoscale Thermal Energy Utilization and Advanced Materials Integration (Invited)

H.J. Kim, DGIST, Korea



Demonstration of InGaAs Nanowire Array Photodiode on Si

K. Chiba, A. Yoshida, K. Tomioka and J. Motohisa, Hokkaido Univ., Japan



Carbon Nanotube Tipped Cantilevers Applied to Nanometrology in Dynamic Mode Atomic Force Microscopy

J. Su, N.N. Chu, M.H. Shiao and C.N. Hsiao, Natl. Applied Res. Labs., Taiwan



Reliable sub-10 nm Block Copolymers Development : Synthesis and Thermally Annealed Formation of Perpendicularly Orientated Lamellar Structures  (Invited)

T. Hayakawa 1, R. Nakatani 1, A. Chandra 1, Y. Yoshimura 1, Y. Seino 2, H. Sato 2, Y. Kasahara 2, T. Azuma 2, 1 Tokyo Inst. of Technol. and 2 EIDEC, Japan



Evaluation of Arrangement Error of Micropore X-Ray Mirrors Due to Hot Plastic Deformation Process

D. Ishi 1, M. Numazawa 1, Y. Ezoe 1, K. Takeuchi 1, M. Terada 1, M. Fujitani 1, T. Itoyama 1, R. Otsubo 1,

A. Fukushima 1, T. Ohashi 1, K. Ishikawa 2, K. Mitsuda 2 and K. Morishita 3, 1 Tokyo Metropolitan Univ., 2 ISAS/JAXA and 3 Kyoto Univ., Japan



Synthesis of Silver Particles-Reduced Graphene Oxide Composite As Photodetector

N.S.A. Aziz 1, Y. Nakajima 2, H. Sato 2, T. Maekawa 2 and A.M. Hashim 1, 1 Univ. Teknologi Malaysia, Malaysia and 2 Toyo Univ., Japan



TEM Observation of Graphitization at 250oC for Amorphous Carbon Nanofibers Including Novel Catalyst Nanoparticles

M.I. Araby, S. Sharma, G. Kalita and M. Tanemura, Nagoya Inst. of Technol., Japan



Directed Polymeric Assembly via Photo-Thermal Processes

H.M. Jin, S.K. Cha, J.H. Kim and S.O. Kim, KAIST, Korea



Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating

T. Konishi 1,2,3, D. Yamane 2,3, T. Safu 1, C.-Y. Chen 2,3, T.-F.M. Chang 2,3, H. Ito 2,3, S. Dosho 2,3, N. Ishihara 2,3, M. Sone 2, 3, K. Machida 2,3, K. Masu 2,3, and S. Iida 1, 1 NTT-AT, 2 Tokyo Inst. of Technol. and 3 JST-CREST, Japan



Energetics and Electronic Structures of Chemically Decorated C60 Chains

S. Furutani and S. Okada, Univ. of Tsukuba, Japan



Stable Solutal-Marangoni Flows Around a Microbubble in Water/1-Butanol Mixtures

K. Namura and M. Suzuki, Kyoto Univ., Japan

8A-5 Author's Interview:


8B-5 Author's Interview:


8C-5 Author's Interview:


8D-5 Author's Interview:


Convention Lobby (2F)

Coffee Break

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

8A-6: Next Generation Nanodevices (10:50-12:10)


Y. Kim (Kyung Hee Univ.)

C.-H. Lee (Korea Univ.)

8B-6: Nanofabrication I (11:10-12:20)


J.J. Lee (KIMM)

K. Takase (Nihon Univ.)

8C-6: Resist and Directed Selef-Assembly II (11:00-12:10)


S.O. Kim (KAIST)

T. Nagai (JSR)

8D-6: Microsystem Technology and MEMS I (11:10-12:30)


R. Takigawa (Kyushu Univ.)

S.-H. Lim  (Kookmin Univ.)





Hydrogen Ion Implantation-Based Wafer Bonding with Low Blister Formation Temperature (<450) for M3D Integration

H. Han, D. Lim, M.G. Chae, J. Lee, B. Ha and C. Choi, Hanyang Univ., Korea



Fabrication of Large Scale Ni Nano-Patterned Roll Mold for Roll Printing Process (Invited)

G.H. Kim, H. Lim, K. Choi, S. Kwon and J. Lee, KIMM, Korea



Carbohydrate-Based Block Copolymer Self-Assemblies: Sub_10nm Nanostructured Thin Films and DSA Patterning (Invited)

R. Borsali, Grenoble Alpes Univ.,Flance



Fabrication of Silicon on Diamond Structure with an Ultra-Thin SiO2 Bonding Layer by Sputter Etching Method

M. Nagata, R. Shirahama, S. Duangchan and A. Baba, Kyushu Inst. of Technol., Japan



Study of Unique Neural Network on Pulse Signal Generating and Propagating Medium

W. Zheng, F. Maehara and T. Oya, Yokohama Natl. Univ., Japan



Laser Fabrication of High-Performance in-Plane Microsupercapacitors Based on Reduced Graphene Oxide Films

S. Kwon 1, D. Jung 1,2, H. Lim 1,2, G. Kim 1,2 J. Kim 1,2, K.-B. Choi 1,2 and J.J. Lee 1,2, 1 KIMM and 2 Univ. of Sci. and Technol., Korea



Studies on Self-Assembling Processes of Block Copolymer Thin Films by Using Grazing

Incident Small-Angle X-Ray Scattering

M. Takenaka 1,2, T. Omosu 1,2, K. Yoshimoto 1, T. Hayakawa 3, T. Azuma 4, Y. Seino 4, H. Sato 4, Y. Kasahara 4, K. Kodera 4, K. Miyagi 4, M. Shiraishi 4, R. Matsuki 4, T. Kosaka 4, T. Himi 4 and S. Nagahara 4, 1 Kyoto Univ., 2 RIKEN Harima Inst. Res., 3 Tokyo Inst. of Technol. and 4 EIDEC, Japan



Development of Process to Build Micro Channels with the Root Structure of The Plant

S. Nakashima, F. Tsumori, K. Tokumaru, K. Kudo and K. Shinagawa, Kyushu Univ., Japan



The Effect of Bi Dopant in In3SbTe2 Phase-Change Material

M. Choi 1, H. Choi 2,3, S. Kwon 1, S. Kim 3, Y.T. Kim 3 and J. Ahn 1, 1 Hanyang Univ., 2 Virtual Lab and 3 KIST, Korea



Ultrathin Ge Growth on Flat Ag Surface in Hetero-Epitaxial Ag/Ge Structure by Annealing

K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara and S. Miyazaki, Nagoya Univ., Japan



Defect Dynamics of Micro-Phase Separation Process in Directed Self-Assembly of Block Copolymers

T. Azuma 1, Y. Seino 1, H. Sato 1, Y. Kasahara 1, K. Kodera1, K. Miyagi 1, M. Shiraisi 1, R. Matsuki 1, T. Kosaka 1, T. Himi 1, S. Nagahara 1, A. Chandra 2, R. Nakatani 2, T. Hayakawa 2, K. Yoshimoto 3, T. Omosu 3,4 and M. Takenaka 3,4, 1 EIDEC, 2 Tokyo Inst. of Technol., 3 Kyoto Univ. and 4 RIKEN Harima Inst. Res., Japan



Room Temperature Impact Deposition of Ceramic by Laser Shock Wave

K. Jinno, F. Tsumori, K. Kudo and K. Shinagawa, Kyushu Univ., Japan



Triboelectric Nanogenerator with Micropatterned Polymer for Efficient harvest of Mechanical Energy

B. Dudem and J.S. Yu, Kyung Hee Univ., Korea



Effect of Ge Concentration on Poly SiGe Mechanical Properties

A. Uesugi 1, K. Maenaka 2 and T. Namazu 1, 1 Aichi Inst. of Technol. and 2 Univ. of Hyogo, Japan

8A-6 Author's Interview:


8B-6 Author's Interview:


8C-6 Author's Interview:


8D-6 Author's Interview:



Convention Lobby (2F)

8P-7: 13:30-15:30 POSTER SESSION I

1-2: Electron and Ion Beam Technologies



Fabrication of Programmed Defects for Non-Imaging EUV Mask Inspection by Helium

Ion Beam Direct Milling

C.-L. Lee, S.-W. Chien and K.-Y. Tsai, Natl. Taiwan Univ., Taiwan


Photomask Pattern Positional Error Improvement Using Convolution Neural Networks

Y.-S. Sung 1,2 and J.-H. Lee 1, 1 Sungkyunkwan Univ. and 2 Samsung Electronics, Korea


Study on the Beam Extraction Characteristics of Inductively Coupled Plasma Source

for Focused Ion Beam

M.Y. Park 1, M.J. Park 1, K.H. Kim 1, J.H. Won 1 and D.Y. Jang 2, 1 KEMCTI and 2 Seoul Natl. Univ. of Sci. and Technol., Korea


Characterization of Microcolumn Using Modified Si Deflectors

H.W. Kim, Y.B. Lee, D.W. Kim, S.J. Ahn, T.S. Oh and H.S. Kim, Sun Moon Univ., Korea

1-3: Resist and Directed Self-Assembly

Chair: S.O. Kim (KAIST)


Microwave Irradiation Effects for Contact Resistance with n-Doped Poly Si

J.-Y. Pyo and W.-J. Cho, Kwangwoon Univ., Korea


3D Complicated Multimetal Nanomesh Patterns Fabricated from Perforated Lamellar Block Copolymer Self-Assembly

S.K. Cha, H.M. Jin, J.H. Kim and S.O. Kim, KAIST, Korea


Conversion of 2D Self-Assembled BCP Pattern into Manifold 3D Structure by Chemically Modified Graphene Layer

J.H. Kim, J.Y. Kim, J. Lim, H.M. Jin and S.O. Kim, KAIST, Korea


Multi Component Metal Nanowire Array by Using Block Copolymer Patterning and Reversible Ion Loading

G.G. Yang, J.H. Mun, S.K. Cha and S.O. Kim, KAIST, Korea

2-1 Nanocarbons



Improved Electrical Properties of Reduced Graphene Oxide Film by Water-Assisted Thermal Process

R. Negishi 1, T. Nakagiri 1, M. Akabori 2 and Y. Kobayahsi 1, 1 Osaka Univ. and 2 JAIST, Japan


Anisotropic Surface Work Function of Graphene with Applying Electric Field

H.T. Kim1, D.J. Park 2, D.S. Shin 1, H.-S. Jang 1, B.H. Kim 1 and S.B. Choi 1, 1 Incheon Natl. Univ. and 2 Hallym Univ., Korea


Energetics and Electronic Structure of Graphene Heterostructures via Substitutional Doping with B3N3

H. Sawahata 1, M. Maruyama 1, N.T. Cuong 2, H. Omachi 3, H. Shinohara 3 and S. Okada 1, 1 Univ. of Tsukuba, 2 NIMS and 3. Nagoya Univ., Japan


Energetics of Edge Oxidization of Graphene Nanoribbons

A. Yasuma 1, A. Yamanaka 2 and S. Okada 1, 1 Univ. of Tsukuba and 2 Res. Organization for Infom. Sci. and Technol., Japan


The Use of Patterned-MoS2 Nanosheets as Template and Transport Layers in Polarized Light Emitting Diodes

G.V. Le 1, G.J. Choi 2, K.S. Choi 3, K.C. Kwon 4, H.W. Jang 4, J.S. Gwag 2 and S.Y. Kim 1, 1 Chung-Ang Univ., 2 Yeungnam Univ., 3 Korea Basic Sci. Inst. and 4 Seoul Natl. Univ., Korea


Synthesis and Characterization of One Dimensional Molybdenum Disulfide Wires Using Precipitation Techniques

S.-K. Lee, KIST, Korea


In-situ Spectroscopic Monitoring of Heavy Metal Presented in the Industrial Wastewater

S. Kim, I.G. Lee, J.H. Seo and W.S. Hwang, Korea Aerospace Univ., Korea


Chemical Vapor Deposition Synthesized Various Stacking-Oriented Multilayerd MOS2 Crystals

S.M. Shinde, K.P. Dhakal, X Chen and J.H. Ahn, Yonsei Univ., Korea


Morphology and Electrical Studies on MoS2 Field-Effect Transistor after Ultraviolet Light Irradiation

A. Ando, J. Miyawaki, T. Kudo, AIST, Japan


Mechanical Resonance Characteristics of MoS2 Mechanical Resonator

D. Yoshikawa, Y. Miyamoto, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan


2-2: Nanodevices

Chair: C.-H. Cho (DGIST)


High-Voltage Lateral Double Implanted MOSFETs Implemented on HPSI 4H-SiC Substrates with Gate Field Plates

O. Seok 1, H.W. Kim 1, J.H. Moon 1, H.-S. Lee1,2 and W. Bahng 1, 1 KERI and 2 Kyeongsang Univ., Korea


Single-Mode Lasing Action from Arbitrary Gain Materials

M. Umar, K. Min, S. Kim, M. Jo and S. Kim, Ajou Univ., Korea


Temperature Imaging of Graphene/hBN Heterostructure under Current

H. Kim 1, D. Kim 2, M.-H. Bae 2 and H. Rho 1, Chonbuk Natl. Univ. and 2 Korea Res. Inst. of Standards and Sci., Korea


High-Performance Perovskite Solar Cells Employing AuCl3-Doped-Graphene Transparent Conductiong Electrodes

S.W. Seo, H.S. Lee, J.M. Kim, J.H. Kim, C.W. Jang, S. Kim and S.-H. Choi, Kyung Hee Univ., Korea


Ni/p-Cu2O/SiOx/n-SiC/n-Si/Al Nonvolatile pu Memory Diode with High Endurance Characteristics Fabricated by Sputtering of n-SiC and Reactive-Sputtering of SiOx Both at Room Temperature

A. Somura, T. Tsukamoto and Y. Suda, Tokyo Univ. of Agriculture and Technol., Japan


Wafer-Scale Production of Highly Uniform Two-Dimensional MoS2 by Metal Organic Chemical Vapor Deposition

T.W. Kim 1, J. Mun 1, H. Park 1,2, D. Jung 1,2, M. Diware 1, C. Won 1, J. Park 2, S.H. Jeong 2, J.C. Shin 3, S.-W. Kang 1,4, 1 Korea Res. Inst. of Standards and Sci., 2 Kyungpook Natl. Univ., 3 Yeungnam Univ. and 4 Univ. of Sci. and Technol., Korea


Resistive Switching Characteristics of Manganese Oxide Thin Film and Nanoparticles Assembly Hybrid Devices

H. Abbas 1, M.R. Park 1, Y. Abbas 2, Q. Hu 1, T.S. Kang 1, T.-S. Yoon 1 and C.J. Kang 1, 1 Myongji Univ. and 2 Hanyang Univ., Korea


Reduction of Surface Oxide on Black Phosphorus by Chemical Treatment

D.-H. Kwak 1, H.-S. Ra 1, M.-H. Jeong 1, A-Y. Lee 1, J. Yang 2, J.-H. Lee 2 and J.-S. Lee 1, 1 DGIST and 2 GIST, Korea


Enhanced Photoresponsivity of 2-D Monolayer Photodetector by Silver Nanowires

S. Bang 1, N.T. Duong 1, H.M. Oh 1, J. Lee 1, Y.-H. Cho 2,3, K. Yang 1, H. Kim 1, S.J. Yun 1, M.-K. Kwon 2, J.-Y. Kim 3, J. Kim 1 and M.S. Jeong 1, 1 Sungkyunkwan Univ., 2 Chosun Univ. and 3 KOPTI, Korea


Gate Material Engineering for Two-Dimensional Layered Materials Based Field-Effect Transistors

D.S. Chung, T. Eum and Y.H. Lee, Sungkyunkwan Univ., Korea


Evaluation of Low-Thermal Budget Microwave Irradiation Effect on Impurity Activation and Post Metal Annealing Processes in SOI-MOSFETs

G.Y. Lee and W.-J. Cho, Kwangwoon Univ., Korea


Tri-State Resistive Switching Characteristics of MnO/Ta2O5 RRAM Device Controlled by Reset Voltage

N.J. Lee, T.S. Kang, Q. Hu, T.S. Lee, T.-S. Yoon and C.J. Kang, Myongji Univ., Korea


Hexagonal Boron Nitride Encapsulated Tin Disulfide Transistor with Enhanced Interlayer Coupling

D. Chu and E.K. Kim, Hanyang Univ., Korea


Adsorption State of Dopamine on MoS2 Observed from Transfer Characteristic for Highly Sensitive Biosensor

N.T. Trung 1, I. Tsukamoto 1, I.M. Alam 1, M.I. Hossain 1, T. Takaoka 1, T. Komeda 1, and A. Ando 2, 1 Tohoku Univ. and 2 AIST, Japan


Electrical Properties of Hydrothermal Synthesized β-Ga2O3 Nanostructure

Y. Yoon, S. Kim, B.H. Kim, I. Park, I.G. Lee and W.S. Hwang, Korea Aerospace Univ., Korea


Improved Output Performance of Triboelectric Nanogenerator by High Dielectric Nanoparticle Embedded PDMS

H.-W. Park 1,2, D. Choi 2 and K.-B. Chung 1, 1 Dongguk Univ. and 2 Kyung Hee Univ., Korea

2-3: Nanofabrication



Deposition of Fine Width Metal Line Using Laser-Induced Forward Transfer

J.-G. Cheon, M.-C. Nguyen, A.H.-T. Nguyen, S.-Y. Han, J.-Y. Kim, S.-J. Choi, H.-M. Ji, S.-W. Kim, K.-M. Yu, J.-H. Kim and R. Choi, Inha Univ., Korea




Formation of Multi-Stacked Ge Quantum Dot by Using Strain-Compensating Si1-xCx Spacer and Carbon Mediation

Y. Itoh 1,2, M. Arita 1, T. Kawashima 1 and K. Washio 1, 1 Tohoku Univ. and 2 JSPS, Japan


Fabrication and I-V Characteristic of Ag-Ag2S Core-Shell Nanoparticles

Y. Amamoto, Hadiyawarman and H. Tanaka, Kyushu Inst. of Technol., Japan


Highly Aligned Nanofibers by Electrospinning onto Preplaced Dielectric Particles

S. Li and B.-K. Lee, Chonnam Natl. Univ., Korea


Use of EBL, Dot-Matrix and DLW for Fabrication of True Color Rainbow Hologram, OVD, Micro-Nanooptics... Designed by s/w "RainBow"

M. Knyazev 1, A. Svintsov 1, S. Zaitsev 1, N. Gusseinov 2 and M. Gabdullin 2, 1 Inst. of microelectronics technol. RAS and 2 Al-Farabi Kazakh Natl. Univ., Kazakhstan


Continuous Fabrication of Plasmonic Wideband Infrared Absorber Film via Photo-Roll Lithography

M. Kim and M.K. Kwak, Kyungpook Natl. Univ., Korea


Hierarchical Structure Foldable Membrane Using Hygroscopic Actuation

J. Bae 1, H. Cho 2, H.S. Kang 2, G. Wu 2, J.C. Jollu 2, S. Yang 2 and W. Park 1, 1 Kyung Hee Univ. and 2 Univ. of Pannsylvania, USA


Influence of Gold-Silver Rough Surface Nanoparticles on Plasmonic Light Scattering in Organic Solar Cells

Q.N. Tran, H.S. Kim and S.J. Park, Gachon Univ., Korea


Fabrication and Characterization of Bimetal Nanowires

R. Akutsu, T. Aono, K. Takeda, K. Sugawa and K. Takase, Nihon Univ., Japan


Nanoinjection Molding of High Resolution Surface Patterns on 3D Objects

W.L. Lee, J. Wu and H.Y. Low, Singapore Univ. of Technol. and Design, Singapore


In-situ Observation of Metastable Oxide Decomposition Area on Si(110) Surface

M. Yano 1, Y. Uozumi 2, S. Yasuda 1 and H. Asaoka 1, 1 JAEA and 2 Hitachi Power Solutions, Japan


Evaluation of Mn-Doped ZnO Thin Films Formed by RF Magnetron Sputtering

N. Minowa, Y. Tamamoto, Y. Zhang, S. Guan and X. Zhao, Tokyo Univ. of Sci., Japan

2-5: Organic Nanomaterials

Chair: T.W. Lee (SNU)


Self-Assembled Chiral Organic Nanowires for Chiroptical Sensing Applications

I. Song, X. Shang, Y.H. Lee, J.H. Jung, and J.H. Oh, POSTECH, Korea


High-Performance Piezoresistive Pressure Sensors Based on Three-Dimensional Electrospun Nanofibers

O.Y. Kweon and J.H. Oh, POSTECH, Korea


Fabrication and Characterization of Dichroic Fine Crystals by the Reprecipitation Method

T. Iino 1, S. Mori 2, K. Shito 1, H. Watanabe 1, A. Kimura 3, Y. Morishita 3 and A. Masuhara 1, 1 Yamagata Univ., 2 Hitachi and 3 Hitachi Chemical, Japan


Synthesis of Benzothiadiazole (BT)-Based Polymers and Their Photovoltaic Applications

N.G. An 1, M.A. Uddin 2,3, Y. Li 2,3, H.W. Cho 1, H.Y. Woo 2 dnd J.Y. Kim 1, 1 UNIST, 2 Korea Univ. and 3 Pusan Natl. Univ., Korea


A Deconvoluted PL Approach to Probe the Charge Carrier Dynamics of the Grain Interior and Grain Boundary of a Perovskite Film for Perovskite Solar Cell Applications

H.J. Jeong 1, A.A. Mamun 2, T.T. Ava 2, M.S. Jeong 1 and G. Namkoong 2, 1 Sungkyunkwan Univ., Korea and 2 Old Dominion Univ., USA




2-6: NanoTool

Chair: R. Kometani (Univ. of Tokyo)


Surface-Enhanced Raman Spectroscopy of Adenine Molecule Using Single Dimer of Gold Nanoparticles

K. Maruoka, K. Ikegami, K. Sugano and Y. Isono, Kobe Univ., Japan


Light Transmission Through Ultrasmall Nanohole with Plasmonic Groove Structure

H.T. Kim 1, S.B. Choi 1, S.S. Choi 2 and D.J. Park 3, 1 Incheon Natl. Univ., 2 Sun Moon Univ. and 3 Hallym Univ., Korea


Development of Novel EUV Actinic Inspection Technique: EUV Scanning Lensless Imaging (ESLI)

D.G. Woo, Y.W. Kim, J.H. Kim, S.H. Shin, W.-Y. Kim and J. Ahn, Hanyang Univ., Korea

8P-7-54  Withdrawn

The Development of Thin Film Thickness Measurement System by Using Soft X-Ray Reflectivity Technology

C.T. Liu, G.D. Chen, T.T. Chen and B.C. He, ITRI, Taiwan


NIL Products Have Begun to See the Light of the World: Star Products of NIL

M.K. Kwak, Kyungpook Natl. Univ., Korea


Investigation of Individual Weight of Parameters on Combined Standard Uncertainty of Nanoscale Measurements According to ISO Standards

C.Y. Su, Y.H. Lin, S.S. Pai, P.L. Chen, N.N. Chu, C.C. Yang and M.H. Shiao, Natl. Applied Res. Labs., Taiwan


Submicron-Resoluved Luminescence Imaging for Detection of Grain Anisotropy Induced Stress in AL2O3 by Near-Field Spectroscopy

T. Tomimatsu 1 and R. Takigawa 2, 1 Tohoku Univ. and 2 Kyushu Univ., Japan


Revealing Defect-Induced Raman Mode of Monolayer Tungsten Disulfide via Tip-Enhanced Raman Spectroscopy

C. Lee, B.G. Jeong, S.J. Yun, Y.H. Lee, S.M Lee and M.S. Jeong, Sungkyunkwan Univ., Korea

3: Nanoimprint, Nanoprint and Rising Lithography

Chair: H. Lee (Korea Univ.)


Self-Aligned, High Resolution Conductive Lines on Microstructured Imprinted Substrate

V.M. Di Pietro, H. Außerhuber and M. Mühlberger, Profactor, Austria


Fabrication of Silicone Grating by Two-Beam Interference Method and Imprint Lithography

Y. Ikeda, T. Higuchi and I. Yamada, Univ. of Shiga Pref., Japan


Development of UV-Curable Liquid for in-Liquid Fluorescence Alignment in Ultraviolet Nanoimprint Lithography

K. Ochiai, M. Kumagai, E. Kikuchi, T. Nakamura and M. Nakagawa, Tohoku Univ., Japan


Infiltration Behaviors of AlOx into Positive-Tone Electron Beam Resists by Sequential Infiltration Synthesis

Y. Ozaki, S. Ito, N. Hiroshiba, T. Nakamura and M. Nakagawa, Tohoku Univ., Japan


Nanoimprint System Development and Status for High Volume Semiconductor Manufacturing

H. Namba, Canon, Japan


Fabrication of Nanocrystal Based Metamaterials

H.-W. Yun 1, S.-J. Kim 1, M.-H. Kim and S.-H. Hong 2, 1 Korea Univ. and 2 ETRI, Korea


Study on Induced Strain Distribution in Direct Nanoimprint Lithography

K. Watanabe, T. Iida, M. Yasuda, H. Kawata and Y. Hirai, Osaka Pref. Univ., Japan


Study on Control of Interfacial Pattern of Imprinted Multi-Layered Material

K. Yonekura, F. Tsumori, K. Tokumaru, K. Kudo and K. Shinagawa, Kyushu Univ., Japan





Various Applications of Imprint Processes by Use of PV A/PET Mold

H. Kawata, K. Uchida, M. Yasuda, and Y. Hirai, Osaka Pref. Univ., Japan


Improving Conversion Efficiency of PV Module Using Flexible and Three-Dimensional Structured Anti-Reflective Film

D. Huh, M. Byun, K. Kim, J. Jun, J. Park and H. Lee, Korea Univ., Korea


Fabrication of Nano to Micro Scale-Patterns of Hematite (Fe2O3) Nanoparticle Using Direct Printing Technique

S. Son, J. Park, S. Ju, D. Chae and H. Lee, Korea Univ., Korea


Chip-Scale Pattern Modification Method to Equalize Residual Layer Thickness in Nanoimprint Lithography

S.-W. Youn, K. Suzuki and H. Hiroshima, AIST, Japan

4: BioMEMS, Lab on a Chip

Chair: A. Matsumoto (Tokyo Medical and Dental Univ.)


Differential-Mode Extended-Gate HEMT-Type Biosensor for the Detection of Streptavidin-Biotin Complexes

H.H. Lee, H.-M. Jeong, S.-W. Kang and J.-K. Shin, Kyungpook Natl. Univ., Korea


Effect of Surface Micropattern on Domain Formation in Supported Lipid Bilayer

K. Dendo and K. Furukawa, Meisei Univ., Japan


Detection of Bull Sperm for Counting Single Cell

C. Phiphattanaphiphop, K. Leksakul and R. Phatthanakun, Chiang Mai Univ., Thailand


Development of Microfluidic Device Integrated with Pillar Structures Enabling Precise Volume Dispensing of Liquid Samples for Therapeutic Drug Monitoring

T. Komatsu, O. Wakao, M. Maeki, A. Ishida, H. Tani and M. Tokeshi, Hokkaido Univ., Japan


3D Design and Binding Specificity of Peptide Aptamers for Multiparametric Cardio-Microarrays

V.V. Luchinin, V.A. Karasev, T.M. Zimina and A.I. Egorov, Saint Petersburg State Electrotechnical Univ., Russia


Optimization of Electrospray-Based Droplet Display Technology for Compartmentalized in-Vitro Selection of Peptide Aptamers

K. Sharma 1, K. Nishigaki 2, Y. Takamura 1 and M. Biyani 1, 1 JAIST and 2 Saitama Univ., Japan


Single-Cell Trapping Using Micropatterned Hydrogel for Morphological Analysis of Bacteria

J. Yoon and W. Park, Kyung Hee Univ., Korea


Time Course Change of Clustered Circulating Tumor Cell in Cancer Metastasis Blood Investigated with Imaging Biomarkers by on-Chip Multi-Imaging Cell Sorter

M. Odaka 1,2, A. Hattori 1,2, K. Matsuura 1,2, M. Iwamura 3, Y. Yamanaka 3, K. Iida 1 and K. Yasuda 1, 1 Waseda Univ., Japan and 2 WABIOS, Singapore


Silver Ion Detection Methodology Using DNA Based Micro-Cantilever

K. Jang 1, C. Park 2, J. You 2, H. Park 2 and S. Na 2, 1 Hoseo Univ. and 2 Korea Univ., Korea


Electrical Current-Induced Failure Mechanism of Cu/Solder Ubump in Wafer Level Packages for BioMEMS Devices

K. Son, H. Ryu, G. Kim, Y.-B. Park, Andong Natl. Univ., Korea


Laboratory-on-a-Chip for Express-Identification and Antibiotic Susceptibility Testing of Microorganizms

V.V. Luchinin 1, T.M. Zimina 1, J.A. Gvozdev 1, N.A. Sitkov 1, V.N. Lemosersky 1, A.V. Soloviev 1, L.A. Kraeva 2, G.N. Hamdulaeva 2 , A.F. Kosko 3, 1 St. Petersburg State Electrotechnical Univ., 2 St. Petersburg Pasteur Inst. and 3 ITMO Univ., Russia


Characterization of Nanoparticle's Surface Based on the Analysis of Electrokinetic Phenomena

V. Majarikar, H. Takehara and T. Ichiki, Univ. of Tokyo, Japan


Relationships between Design and Actuation Range of Soft Magnetic Composites

J. Park, H. Lee and J. Kim, UNIST, Korea



Filter-Free Fluorescence Analysis System Integrated with Microfluidics Device

Y.J. Choi, K. Takahashi, T. Iwata and K. Sawada, Toyohashi Univ. of Technol., Japan



5: Microsystem Technology and MEMS



Pt-Coated X-Ray Micropore Optics Fabricated with Silicon Dry Etching and Atomic Layer Deposition

Y. Ezoe 1, K. Takeuchi 1, M. Numazawa 1, M. Terada 1, M. Fujitani 1, D. Ishi 1, A. Fukushima 1, R. Itoyama 1, R. Otsubo 1, T. Ohashi 1, K. Ishikawa 2, K. Mitsuda 2, and M.J. Sowa 3, 1 Tokyo Metropolitan Univ., 2 ISAS/JAXA, Japan and 3 Ultratech / CNT, USA


The High Aspect Ratio Micro-Grating Structures by Precise Micromachining and Molding Process

Y.-H. Lin, C.-J. Weng, Y.-C. Cheng, N.-N. Chu, C.-C. Chen, M.-K. Wang, C.-N. Hsiao and M.-H. Shiao, Natl. Applied Res. Labs., Taiwan


The Study of Boroflat Glass Molding Process with Micro-Structures by Hot Emboss Technology

M.-K. Wang, Y.-H. Lin, Y.-C. Cheng, N.-N. Chu and C.-N. Hsiao, Natl. Applied Res. Labs., Taiwan


Magnetically Actuated Artificial Cilium with Similar 3D-Movement of Natural Cilium

R. Marume, F. Tsumori, K. Kudo and K. Shinagawa, Kyushu Univ., Japan


Insulated Voltage Sensor Using Resonator Withstanding Higher Voltage

Y. Wada 1, N. Nobunaga 1, S. Kumagai 1, H. Ishihara 2, M. Ishii 2 and M. Sasaki 1, 1 Toyota Technol. and 2 Yazaki, Japan


Development of High Frequency pMUT(Piezoelectric Micromachined Ultrasound Transducer) Based on Sputtered PZT

U. Lim, J. Yoo and K. Lee, Ajou Univ., Korea


Development of Energy Harvesting System Using Deformation of Magnetic Elastomer

H. Shinoda, F. Tsumori, K. Tokumaru, K. Kudo and K. Shinagawa, Kyushu Univ., Japan


Formation of Hierarchical Nanoporous Ag Films for Surface Enhanced Raman Scattering by Cluster Source Deposition Based on Sputtering

S. Yun 1,2, J. Lee 1, J. Yang 3, D. Lee 4, B. Kim 5 and C. Cho 1, 1 Kyungpook Natl. Univ., 2 Kwang-Lim Precision, 3 Yonsei Univ., 4 Yeungnam Univ. and 5 Catholic Univ. of Daegu, Korea


Development of Fiber Coupling Thermal Microscope for Measuring Thermal Property in Micro-Scale Aarea

S. Miyake 1, K. Hattori 2, T. Otsuki 2 and M. Sekine 2, 1 Kobe City College of Technol. and 2 Bethel, Japan


A Novel Joining Technique for Aluminum Foils by Using Al/Ni Exothermic Materials as Saving Heat Source

T. Izumi 1, N. Kametani 1, S. Miyake 1, S. Kanetsuki 2 and T. Namazu 2, 1 Kobe City of College of Technol. and 2 Aichi Inst. of Technol., Japan


Fabrication and Application of Double-Side Notched Long Period Fiber Grating for Force Sensing

Y.-L. Fang 1, T.-H. Huang 1, C.-W. Wu 2 and C.-C. Chiang 1, 1 Natl. Kaohsiung Univ. of Applied Sci. and 2 Air Force Academy, Taiwan


Bidirectional Hysteresis in Frequency Response of Arrayed Electrostatic MEMS Resonator

T. Tsuchiya, Y. Matsui, Y. Hirai and O. Tabata, Kyoto Univ., Japan


Profile Characterization and Temperature Effect on Wettability of Microstructured Surfaces

Y. Han 1, Y. Liu 2, M. Takato 1 and F. Uchikoba 1, 1 Nihon Univ. and 2 Xi'an Univ. of Technol., China


Photo-Induced Manipulation of Microspheres in PEG Solutions on Au Nanoisland Films

N. Chishiro, K. Namura and M. Suzuki, Kyoto Univ., Japan


Effect of Laser Irradiation Conditions on a Water Vapor Microbubble and Thermoplasmonic Marangoni Flow in Degassed Water

S. Imafuku, K. Namura and M. Suzuki, Kyoto Univ., Japan


High Temperature Wettability on Microstructrured Superhydrophobic Surface

Y. Liu 1 and Y. Han 2, 1 Xi'an Univ., China and 2 Nihon Univ., Japan


The Impact of Damping on Aluminum Nitride Piezoelectric MEMS Resonant Sensors

S.I. Jung, C. Ryu and H.J. Kim, Gyeongbuk Inst. of Sci. and Technol., Korea


Modeling of Multi-Mode Piezoelectric Cantilever Sensors for Liquid Property Analysis

C. Ryu, S.I. Jung and H.J. Kim, Daegu Gyeongbuk Inst. of Sci. and Technol., Korea


Polyurethane-Acrylate (PUA) Based Hydrophobic Film: Facile Fabrication, Characterization and Application

J. Park, C.R. Yu, A. Shanmugasundaram and D.-W. Lee, Chonnam Natl. Univ., Korea


A Parallel-kinematic Piezo-Driven Scanner for Improving Scan Speed of a Commercial Atomic Force Microscope

B.O. Alunda 1, Y.J. Lee 1 and S. Park 2, 1 Kyungpook Natl. Univ. and 2 Keimyung Univ., Korea


A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes

H. Niijima 1,3, M. Takayasu 1,3, D. Yamane 1,3, T. Konishi 1,2,3, T. Safu 2, H. Ito 1,3, S. Dosho 1,3, N. Ishihara 1,3, K. Machida 1,3 and K. Masu 1,3, 1 Tokyo Inst. of Technol., 2 NTT-AT and 3 JST-CREST, Japan


Micro Sample Chamber by laminated Fluorinated Films

for NMR Spectroscopy of a Micro-Volume Spherical Sample

T. Hizawa, M. Takahasi 2 and E. Iwase 1, 1 Waseda Univ. and 2 RIKEN, Japan


Measurement of Conformability and Adhesion Energy of Ultrathin Film to Skin Model

J. Sugano, T. Fujie 1,2, H. Iwata 1 and E. Iwase 1, 1 Waseda Univ. and 2 JST-PRESTO, Japan


Effect of Heater Geometry on the Sensitivity of a Thermal Convection-Based Tilt Sensor

J.K. Kim 1 , J.H. Kim 1,S.Y. Kwon 2, J.Y. Lee 2, D.G. Jung 2, S.H. Kong 2 and D. Jung 1, 1 KITECH and 2 Kyungpook Natl. Univ., Korea


High Sensitive Flexible Capacitive Pressure Sensor Based on a Three-Dimensional PDMS/Microsphere Sponge

Y. Jung 1,2, K.K. Jung 2,3, J.S. Ko 2 and H.C. Cho 1, 1 KITECH, 2 Pusan Natl. Univ. and 3 KOMERI, Korea


Optimal Design for a High-Frequency Plano-Convex Quartz Resonator

J. Ji 1, M. Zhao 1, H. Ohigawa 2 and T. Ueda 2, 1 Xidian Univ., China and 2 Waseda Univ., Japan


Room-Temperature Bonding of LiNbO3 and SiO2 Using Surface Activated Bonding

R. Takigawa, E. Higurashi and T. Asano, Kyushu Univ., Japan


Designing Ferromagnetic Shield Geometry with Magnetic Field Simulation to Improve Target Utilizaiton on DC Magnetron Sputtering

S.-H. Jang 1, S.-J. Park 1, K.-Y. Lee 2 and Y.-J. Kim 1, 1 Yonsei Univ. and 2 Samsung Display, Korea

Room A

Room B (Ramada Ballroom 2, 2F)

Room B

Room C (Ramada Ballroom 3, 2F)

Room C

Room D (Ramada Ballroom 4, 2F)

Room D

Room E (Seminar Room, 2F)

8A-8: 2D Nanodevices (15:40-17:50)


C.-H. Lee (Korea Univ.)

8B-8: Nanfabrication II (15:40-17:50)


G.H. Kim (KIMM)

S. Shingubara (Kansai Univ.)

8C-8: Electron and Ion Beam Technologies (15:40-18:10)


D. Jang (Seoul Natl. Univ.)

H.S. Kim (Sun Moon Univ.)

8D-8: Nano Tool (15:40-18:00)


K. Sugano (Kobe Univ.)

J. Lee  (Sogang Univ.)



Light-Emitting Devices Based on Two-Dimensional van der Waals Materials (Invited)

Y.D. Kim 1,2, T. Taniguchi 3, K. Watanabe 3, T.F. Heinz 4, D. Englund 5 and J. Hone 2, 1 Kyung Hee Univ., Korea, 2 Columbia Univ., USA, 3 NIMS, Japan, 4 Stanford Univ. and 5 MIT, USA



Scalable Nanoarchitecturing Via Hybrid Nanoassembly and Continuous Nanopatterning (Invited)

J.G. Ok, Seoul Natl. Univ. of Sci. and Technol., Korea



Ultrafast Electron Microscopy: Principle and Applications (Invited)

O.-H. Kwon, UNIST, Korea










J. Lee, Sogang Univ., Korea



Tunneling Photocurrent Assisted by Interlayer Excitons in Staggered van der Waals Heterobilayers

D.H. Luong, H.S. Lee, G.P. Neupane, S. Roy, G. Ghimire, J.H. Lee, Q.A. Vu and Y.H. Lee, Sungkyunkwan Univ., Korea



Micro Patterned Powder Metallurgy Technique for SOFC Electrolyte Using UV Curable Resin

T. Okabe 1, Y. Kim 2. Z. Jiao 2, N. Shikazono 2 and J. Taniguchi 1, 1 Tokyyo Univ. of Sci. and 2 Univ. of Tokyo, Japan









Y.-S. Hwang, Seoul Natl. Univ., Korea




M.K. Kwak, Kyungpook Natl. Univ., Korea



Fabrication of p-type Monolayer WSe2 Field Effect Transistor

H.M. Oh, C. Park, S. Bang, S.J. Yun, Y.H. Lee and M.S. Jeong, Sungkyunkwan Univ., Korea



Hf Layer Thickness Dependence of Resistive Swithcing Characteristics of Ti/Hf/HfO2/Au(Pt) ReRAM Device

R. Nakajima, A. Azuma, H. Yoshida, T. Shimizu, T. Ito and S. Shingubara, Kansai Univ., Japan



Investigations on Advanced Process Calibration

S. Shimizu 1, G. Lopez 2,3, D. Shakarisaz 2, R. Bojko 2, N. Unal 2 and U. Hofmann 2, 1 GenISys, Japan, 2 GenISys, Germany and 3 Univ. of Pennsylvania, USA



Laser Wavelength Measurement Using Gold Nanoparticle Aggregate Integrated Microresonator

K. Sugano 1, S. Joya 1, N. Arai 1, Y. Tanaka 1, E. Maeda 2, R. Kometani 2 and Y. Isono 1, 1 Kobe Univ. and 2 Univ. of Tokyo, Japan



Quantum Dot Transport in Two-Terminal Devices on a Few Layers of ReS2

J. Park, J. Seo and M. Jung, DGIST, Korea



Characterization of BaTiO3 Nanoparticles Formed in the Pores of Mesoporous Silica SBA-15 Thin Films

A. Kohno and T. Tajiri, Fukuoka Univ., Japan



Simulation of Resist Exposure in Sub-10nm Ion Beam Lithography with FIB

S.I. Zaitsev and Y.L. Shabelnikova, Inst. of Microelectronics Technol. RAS, Russia



Detection Characteristics of Strain of Ultra-Thin Silicon Structure by Raman Spectroscopy

R. Kometani, K. Okada and E. Maeda, Univ. of Tokyo, Japan



Pushing the Subthreshold Swing to the Thermal Limit Using h-BN Dielectrics in Monolayer MoS2 Channel FETs

Q.A. Vu, S. Fan, S.H. Lee, M.-K. Joo, W.J. Yu and Y.H. Lee, Sungkyunkwan Univ., Korea



Scanning Electron Beam Induced Deposition for Conductive Tip Modification

P.L. Chen 1, J. Su 1, M.H. Shiao 1, M.N. Chang 2, C.H. Lee 3 and C.W. Liu 3, 1 Natl. Applied Res. Labs., 2 Natl. Chung Hsing Univ. and 3 Natl. Taiwan Univ., Taiwan



Computational SEM Metrology and Inspection

K. Arat 1, N. Unal 2, J. Bolten 3, C.W. Hagen 1, T. Klimpel 2, 1 Delft Univ. of Technol., The Netherlands, 2 GenISys and 3 AMO, Germnay



Fabrication of an Electron Beam Deposited Tip for Atomic-Scale AFM Measurements in Liquid with a Small Cantilever

K. Miyazawa 1, H. Izumi 1, T. Watanabe-Nakayama 1 and T. Fukuma 1,2, 1 Kanazawa Univ. and 2 JST-ACT-C, Japan



Development of P-N Diode Using Two Dimensional Nanomaterials

C. Park, N.T. Duong, S.H. Bang, D.A. Nguyen, Y.H. Lee and M.S. Jeong, Sungkyunkwan Univ., Korea



Evaluation of Resistive Switching Properties of Si-Rich Oxide Embedded with Ti Nanodots by Applying Constant Voltage and Constant Current

A. Ohta, Y. Kato, M. Ikeda, K. Makihara and S. Miyazaki, Nagoya Univ., Japan



Experimental Investigation of the Distribution of Energy Deposited by FIB in Ion-Beam Lithography

N. Gusseinov 1, M. Gabdullin 1, Y.L. Shabelnikova 2 and S.I. Zaitsev 2, 1 Al-Farabi Kazakh Natl. Univ., Kazakhstan

and 2 Inst. of Microelectronics Technol. RAS, Russia



Localized Electroless Ag Plating at a Tip Apex for Scanning Kelvin Probe Microscopy

C.-T. Lin 1, M.-H. Yu 2, J. Su 1, P.-L. Chen 1, M.-H. Shiao 1 and M.-N. Chang 2, 1 Natl. Applied Res. Labs. and 2 Natl. Chung Hsing Univ., Taiwam

8A-8 Author's Interview:


8B-8 Author's Interview:


8C-8 Author's Interview:


8D-8 Author's Interview:


Room A (Ramada Ballroom 1, 2F)

18:30-20:30 Banquet


































Thursday, November 9

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

9A-9: Microsystem Technology and MEMS III (9:00-10:30)


C. Ji (Ewha Womans Univ.)


9B-9: Nanofabrication III (9:00-10:30)


D.J. Kang (SKKU)

A. Kohno (Fukuoka Univ.)

9C-9: Advanced Lithography I (9:00-10:10)


J. Miyazaki (ASML)

9D-9: Bio MEMS and Lab on a Chip I (9:00-10:10)


A. Matsumoto (Tokyo Medical and Dental Univ.)

K.M. Byun (Kyung Hee Univ.)



Recent Advancement on Low Loss Metaconductor Technology for Energy Efficient 5G and Millimeter Wave Appications(Invited)

Y.-K. Yoon, S. Hwangbo, T. Clingenpeel and A. Rahimi, Univ. of Florida, USA.-K. Yoon, Univ. of Florida, USA



Effect of Photo-Illumination on Gold Nano-Particles Assisted Chemical Etching of Silicon

Y.-S. Lin 1, C.-P. Lai 1, Y.-H. Lin 2, N.-N. Chu 2, C.-T. Lin 2, C.-L. Hsieh 2, C.-N. Hsiao 2 and M.-H. Shiao 2, 1 Natl. United Univ. and 2 Natl. Applied Res. Labs., Taiwan



EUV High Volume Manufacturability (Invited)

Y.S. Kang, Samsung Electronics, Korea



Single Particle Tracking Analysis of Extracellular vesicles Down to 30 nm in a Microfluidic Chip

T. Akagi 1,2, R. Okamura 1, H. Kishita 1, M. Nakakuki 1 and T. Ichiki 1,2, 1 Univ. of Tokyo and 2 iCONM, Japan



Fabrication of Three-Dimensional Integrated CMOS Image Sensors with Quarter VGA Resolution by Pixel-Wise Direct Bonding Technology

M. Goto 1, Y. Honda 1, T. Watabe 1, K. Hagiwara 1, M. Nanba 1, Y. Iguchi 1, T. Saraya 2, M. Kobayashi 2, E. Higurashi 2, H. Toshiyoshi 2 and T. Hiramoto 2, 1 NHK Sci. and Technol. Res. Lab., and 2 Univ. of Tokyo, Japan



Preliminary Study of Fabrication of Ag-Ag2S Nanoparticles and Random Network for Reservoir Computing

Hadiyawarman 1, Y. Amano 1, M. Eguchi 2 and H. Tanaka 1, 1 Kyushu Inst. Technol. and 2 Fuzzy Logic Inst., Japan



Patterning Performance Improvement in EUV Lithography Through Process Optimization

S. Park, M. Lim, I. Lee, H. Kim, K. Kim and C.-M. Lim, SK hynix, Korea



Sensitive Voltage Sensitive Dye Imaging in Living Neuronal Network on Bull's Eye-Plasmonic Chips

W. Minoshima 1, S. Izumi 1, C. Hosokawa 1,2, S.N. Kudoh 1 and K. Tawa 1,2, 1 Kwansei Gakuin Univ. and 2 AIST, Japan



5 MHz Pn-Diode Resonator with In-Plane Longitudinal Extensional Mode

F. Miyazaki, K. Baba, H. Tanigawa, T. Furutsuka and K. Suzuki, Ritsumeikan Univ., Japan



Multi-Functional Core/Shell Nanoparticles Fabricated by Atomic Layer Deposition Technology

S. Seong, Y.C. Jung, T. Lee, I.-S. Park, K. Yoo, S. Lee and J. Ahn, Hanyang Univ., Korea



3-Dimensional Photolithography

D. Sugihara, H. Kikuta, H. Kawata, M. Yasuda, M. Sasago and Y. Hirai, Osaka Pref. Univ., Japan




H.-N. Kim, KIST, Korea



Selective Molecular Detection on a Suspended Graphene Developed by Low-Pressure Dry Transfer Technique

S. Kidane 1, H. Ishida 1, K. Sawada 1 and K. Takahashi 1,2, 1 Toyohashi Univ. of Technol. and 2 JST-PRESTO, Japan



Effective Excitation of Copper Surface Plasmon Resonance and Its Applications (Invited)

K. Sugawa, Nihon Univ., Japan

9A-9  Author's Interview:


9B-9 Author's Interview:


9C-9 Author's Interview:


9D-9  Author's Interview:


Convention Lobby (2F)

Coffee Break

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

9A-10: Inorganic Nano Materials II (10:50-12:00)


D.H. Kim (Chungbuk Natl. Univ.) M. Suzuki (AIST)

9B-10: Nanofabrication IV (10:50-11:50)


H. Tanaka (Kyushu Inst. of Technol.)

9C-10: Advanced Lithography II (10:30-11:50)


S.-S. Kim (Samsung Electronics)

J. Miyazaki (ASML)

9D-10: Bio MEMS and Lab on a Chip II (10:30-11:40)


K. Furukawa (Meisei Univ.)

W. PARK  (Kyung Hee Univ.)



Recent Progress of Droplet Epitaxy to Form Type-II Quantum Ring Nanostructures (Invited)

J.S. Kim 1, V. Dahiya 2,3, M. Zamiri 3,4, S. Krishna 2,3 and S.J. Lee 5, Yeungnam Univ., Korea, 2 Ohio State Univ., 3 Univ. of New Mexico, 4 Univ. of Wisconsin, USA and 5 Korea Res. Inst. of Standards & Sci., Korea



Investigation of Piezoresistive Effect in PMOSFETs Fabricated on Circular SOI Diaphragms Using Minimal ICP-RIE and Mask Aligner

Y.X. Liu, H. Tanaka, N. Umeyama, S. Khumpuang, M. Nagao, T. Matsukawa and S. Hara, AIST, Japan





Does Litho Need MI’s Help? (Invited)

B.-H. Lee, SK Hynix, Korea



Programming Anisotropy in Soft Materials Using Magnetic Self-Assembly for Bioapplications (Invited)

J. Kim, UNIST, Korea



Coupling Effect Characteristics of In0.4Ga0.6AS/GaAs Multi-Stacked Quantum Dots without Straion Balancing Technique

K. Goshima 1, N. Tsuda 1, K. Inukai 1, K. Komori 2 and T. Sugaya 2, 1 Aichi Inst. of Technol. and 2 AIST, Japan



Composition Control of InGaAs Nanowires on Ge(111) Substrates by Selctive-Area Growth

A. Yoshida, K. Chiba, Y. Minami, K. Tomioka and J. Motohisa, Hokkaido Univ., Japan



Characteristics of Silicon Nitride Composites for EUV Pellicle Application

Y.J. Jang, J.H. Kim, I.S. Kim, S.G. Lee, H.K. Oh and J. Ahn, Hanyang Univ., Korea



An Elastomer-Based MEMS Fabry-Perot Interferometric Biosensor with Open-Cavity Structure

R. Teramoto 1, S. Maruyama 1, I. Takahashi 2, S. Takeoka 2, T. Fujiie 2,3, K. Sawada and K. Takahashi 1,3, 1 Toyohashi Univ. of Technol., 2 Waseda Univ. and 3 JST-PRESTO, Japan



Effect of The Particle Size on The Magnetic and Electric Properties of Free Standing La2-xSrxCuO4 and La2CuO4+y Nanoparticles

F. Budiman 1, Y. Horibe 1, M. Eguchi 2 and H. Tanaka 1, 1 Kyushu Inst. of Technol. and 2 Fuzzy Logic Systems Inst., Japan




Confinement Effect on I-V Characteristics of Resistive Change Memory Using Oxide Nanowire

T. Aono 1, K. Sugawa 1, T. Shimizu 2, S. Shingubara 2 and K. Takase 1, 1 Nihon Univ. and 2 Kansai Univ., Japan



Feasibility of Multi-Stack EUV Pellicle Membrane for EUV Non-Actinic Mask Inspection System Using DUV Wavelength

S.-G. Lee and H.-K. Oh, Hanyang Univ., Korea



Laboratory-on-a-Chip for Express-Identification and Antibiotic Susceptibility Testing of Microorganizms

V.V. Luchinin 1, T.M. Zimina 1, J.A. Grozdez 1, N.A. Sitkov 1, V.N. Lemosersky 1, A.V. Soloviev 1, L.A. Kraeva 2, G.N. Hamdulaeva 2 and A.F. Kosko 3, 1 St. Petersburg State Electrotechnical Univ., 2 ST. Petersburg Pasteur Inst. and 3 St. Petersburg State

9A-10  Author's Interview:


9B-10 Author's Interview:


9C-10 Author's Interview:


9D-10  Author's Interview:



Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

9A-11: Inorganic Nano Materials III (13:30-15:00)


M. Osada (NIMS)

K. Kyhm (Pusan Natl. Univ.)

9B-11: Nanofabrication V (13:30-14:50)


A. Kohno (Fukuoka Univ.)

G.H. Kim (KIMM)

9C-11: Advanced Lithography III (13:30-14:50)


C. Lim (SK Hynix)

T. Uchiyama (Toshiba Memory)

9D-11: Bio MEMS and Lab on a Chip III (13:30-14:30)


T. Akagi (Univ. of Tokyo )




Spin Dynamic of Ferromagnetic Nano- Multilayer Films over Wide Ranges of Timescale (Invited)

D.-H. Kim, Chungbuk Natl. Univ., Korea



Nanorods and Nanopores Fabricated by Liquid Crystalline Block Copolymer

T. Iyoda, Doshisha Univ., Japan



EUV Lithography Industrialization and Technology Progress (Invited)

J. Finders, ASML, The Netherland



Development of Ceramic Three-Dimensional Micro Channel by Combined Process of Laser Processing and Imprinting

K. Tokumaru, S. Hunt, F. Tsumori, K. Kudo and K. Shinagawa, Kyushu Univ., Japan



Electron Transport Calculation of Nanocrystalline Bi2Te3 Thin Films by Oblique Deposition Method

S. Morikawa, Y. Satake and M. Takashiri, Tokai Univ., Japan



Solvent-Assisted Universal Transfer for 2D Layered Materials

I. Gasparutti, S. Song and Y.H. Lee, Sangkyunkwan Univ., Korea



Using Platinum for Absorber Stack of Phase Shift Mask in High Numerical Aperture Extreme Ultraviolet Lithography

J.S. Kim, D.G. Woo and J. Ahn, Hanyang Univ., Korea



Blast-Induced Intracranial Brain Deformation Sensor

S. Song 1, N. Race 2, A. Kim 3, T. Zhang 2, R. Shi 2 and B. Ziaie 2, 1 Sngkyunkwan Univ., Korea, 2 Purdue Univ. and 3 Temple Univ., USA



A Novel and Facile Route to Synthesize Atomic-Layered MoS2 Film for Large-Area Electronics

S. Boandoh 1, S.M. Kim 2 and K.K. Kim 1, 1 Dongguk Univ. and 2 KIST, Korea



Formation of Silicon Nanoporous and Silicon Nanowires on V-groove Textured Silicon Using Metal Assisted Chemical Etching Method

M.K.N. Azmi 1, Y. Nakajima 2, T. Maekawa 2 and A.M. Hashim 1, 1 Univ. Teknologi Malaysia, Malaysia and 2 Toyo Univ., Japan



Thermal and Structural Deformation of Extreme Ultraviolet Mask by Exposure

C.-H. Ban, E.-S. Park, J.-H. Park and H.-K. Oh, Hanyang Univ., Korea



Magnetic Beads Based Local Enzyme Immobilization Method for Multi-Neurotransmitter Image Sensor with Microhole Array Structure

Y. Ogaeri, M. Mitsudome, Y.-N. Lee, T. Iwata, K. Takahashi and K. Sawada, Toyohasi Univ. of Technol., Japan



First-Principles Simulation on Thermoelectric Properties in Transition Metal Dichalcogenide Monolayers

K. Nakamura 1,2, 1 Kyoto Univ., Japan and 2 Egypt-Japan Univ. of Sci. and Technol., Egypt



Fabrication of MoS2 Quantum Dots by High Power Femtosecond Laser Irradiation

S.-J. An, S. Bang, D.Y. Park, N.D. Anh, J.-H. Kim, H.Y. Kim, H.J. Jeong and M.S. Jeong, Sangkyunkwan Univ., Korea


9A-11 Author's Interview:


9B-11 Author's Interview:


9C-11 Author's Interview:


9D-11 Author's Interview:


Convention Lobby (2F)

9P-12: 15:20-17:20 POSTER SESSION II

1-1: Advanced Photolithography

Chair: S. Kim (Ajou Univ)


Timing Aware Advanced Retargeting

P. Mantripragada 1, A. Mampazhy 1, B. Sayah 2, S. Mandal 3, 1 GlobalFoundries Eng., India, 2 GlobalFoundries, USA and 3 Maxlinear Technologies, India


Selective Defocus Grey-Scale Mask to Address Local Bridging and Pinch-off Issues

S. Srivatsa 1, M. Ghosal 1, A. Mampazhy 1, I. Stobert 2, R. Viswanathan 2 and M. Gheith 2, 1 GlobalFoundries Eng., India and 2 GlobalFoundries, USA


Thermo-Mechanical Analysis of the Extreme Ultraviolet Pellicle with the Residual Stress

E.-S. Park, C.-H. Ban, J.-H. Park and H.-K. Oh, Hanyang Univ., Korea


Lithography Simulation and OPC for Next Generation Display Technology

N. Taksatorn 1, K. Yoshida 2, N. Unal 1, GenISys, Germany and 2 Hoya, Japan

2-1 Nanocarbons



Effect of Various Surfactants on Morphology of Cu/SWCNT Electroplating Films

M. Shimizu, T. Ogasawara and S. Arai, Shinshu Univ., Japan


Surface Morphology Changes of CVD-Graphene/Cu{120} Induced by Post-Annealing Processes

Y. Ogawa 1, Y. Murata 2, S. Suzuki 1, H. Hibino 1,3, S. Heun 2, K. Kumakura 1, 1 NTT, Japan and 2 NEST, Italy and 3 Kwansei Gakuin Univ., Japan


Chemical Vapor Deposition Based Rapid Graphene Growth System

K.P. Sharma, G. Kalita and M. Tanemura, Nagoya Inst. of Technol., Japan

9P-12-8  Withdrawn


Investigation on Mo1-xWxS2 Fabricated by Co-Sputtering and Post-Deposition Sulfurization with (t-C4H9)2S2

Y. Hibino 1, S. Ishihara 1,4, N. Sawamoto 1, T. Ohashi 2, K. Matsuura 2, H. Machida 3, M. Ishikawa 3, H. Sudoh 3, H. Wakabayashi 2 and A. Ogura 1, 1 Meiji Univ., 2 Tokyo Inst. of Technol., 3 Gas-Phase Growth and 4 JSPS, Japan


Joule Heat Induced Synthesis and Nanosoldering of Carbon Nanotubes in Insitu TEM

S. Sharma, G. Kalita and M. Tanemura, Nagoya Inst. of Technol., Japan


GAS Sensor Using a Carbon Nanotube Yarn to Detect Acetylene Molecules

J.K. Kim 1, S.Y. Kwon 2, J.Y. Lee 2, D.G. Jung 2, S.H. Kong 2 and D. Jung 1, 1 KITECH and 2 Kyungpook Natl. Univ., Korea

9P-12-12  Withdrawn


Photoresponse of Graphene FET with n-type Si Schottky Gate

S. Kobayashi, Y. Anno, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan


Atmospheric-Pressure-Plasma-Jet Processed Reduced Graphene Oxides and Carbon Nanotubes for Supercapacitor Application

F.-H. Kuok, C.-W. Chen, I-C. Cheng, C.-C. Hsu and J.-Z. Chen, Natl. Taiwan Univ., Taiwan


Stack Angle Dependency of Interlayer Excitons in MoSe2/WSe2 van der Waals Heterostructures

P.K. Nayak 1, Y. Horbatenko 2, S. Ahn 2, G. Kim 2, J.-U. Lee 3, K.Y. Ma 2, A-R. Jang 2,4, H. Lim 5, D. Kim 6, S. Ryu 6, H. Cheong 3, N. Park 2, and H.S. Shin 2, 1 Indian Inst. of Technol. Madras, India, 2 Ulsan Natl. Inst. of Sci. and Technol., 3 Seogang Univ., Korea, 4 Oxford Univ., UK, 5 Chonnam Natl. Univ. and 6 POSTECH, Korea


Electronic Structure of Graphene/h-BN Monolayer on Fe Substrate

N.T. Cuong, NIMS, Japan


Impact of Small Amount of Ni Atoms on Contact Resistance in Metal-Graphene System

X. Yin and S. Kasai, Hokkaido Univ., Japan




2-2: Nanodevices

Chair: W.S. Hwang (Korea Aerospace Univ.) 


Gate-Modulated Charge Transport and Photo-Induced Current in van Der Waals Heterostructures with Strong Interfacial Coupling

M.-H. Doan, Y. Jin, J. Zhao and Y.H. Lee, Sungkyunkwan Univ., Korea


Role of Hole Trap Sites in MoS2 for Inconsistent Optical and Electrical Phenomena

M.D. Tran, J.-H. Kim, H. Kim, M.H. Doan, D.L. Duong and Y.H. Lee, Sungkyunkwan Univ., Korea


DC and RF Performance Comparison of p-i-n TFET and p-n TFET

Y.J. Yoon, J.H. Seo, J.-H. Lee and I.M. Kang, Kyungpook Natl. Univ., Korea


Highly Sensitive pH Sensor Using NiO Nanosheets Sensing Electrode and Extended-Gate Field-Effect Transistor

C.-Y. Kuo, H.-H. Tseng, R.-M. Ko and S.-J. Wang, Natl. Cheng Kung Univ., Taiwan


Flexible Piezoelectric Nanogenerators Integrated with ZnO Nanoflowers/PDMS Composite Films

D.H. Kim, B. Dudem and J.S. Yu, Kyung Hee Univ., Korea


Evaluation of Optical Properties of Bismuth Telluride Nanoplate Thin Films

K. Wada, K. Tomita and M. Takashiri, Tokai Univ., Japan


Evaluation of Electrical Characteristics of V-Grooved FETs Using One-Dimensional Array of Gold Nanoparticles

T. Ban 1, M. Uenuma 2, S. Migita 3, I. Yamashita 2, Y. Uraoka 2, S. Yamamoto 1, 1 Ryukoku Univ., 2 NAIST and 3 AIST, Japan


A Study on the Resistance Switching of Ag2Se and Ta2O5 Heterojunctions Using Structural Engineering

T.-S. Lee, N.-J. Lee, Q. Hu, H. Abbas, T.-S. Kang, T.-S. Yoon and C.-J. Kang, Myongji Univ., Korea



Electrical Properties of SiO2 Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

M.-W. Ha 1, K. Choi 1, D.H. Kim 2 and T.J. Park 1,2, 1 Myongji Univ. and 2 Hanyang Univ., Korea


Fabrication of Transparent FTO/ZnO/PEDOT:PSS Solar Cells

H. Naganuma 1, A. Mori 1, C. Takada 1, S. Komuro 2 and X. Zhao 1, 1 Tokyo Univ. of Sci. and 2 Toyo Univ, Japan


Atomic Layer Deposited SiO2/4H-SiC Metal Oxide Semiconductor Using Ar Post-Deposition Annealing

S. Lee 1, H. Kim 1, H.J. Kang 1, M.-W. Ha 2 and H.J. Kim 1, 1 Seoul Natl. Univ. and 2 Myongji Univ., Korea




Development of Optimized Annealing Method for Graphene Source/Drain Electrodes in In-Ga-Zn-O Thin-Film Transistors Using Microwave Irradiation

E.-K. Hong and W.-J. Cho, Kwangwoon Univ., Korea


Evaluation of Carrier Transport Mechanism in Long P3HT Molecular Wire Using Graphene Nanogap Electrodes

T. Ikuta 1,2, S. Tamba 2, K. Inoue 2, Y. Ie 2, Y. Aso 2, K. Matsumoto 2 and K. Maehashi 1,2, 1 Tokyo Univ. of Agriculture and 2 Osaka Univ., Japan


Write-Once-Read-Many-Times Switching Behaviors of One Diode–One Resistor Nonvolatile Organic Memory Devices Based on Inorganic Schottky Diodes and Hybrid Nanocomposites

S. Sung, C. Wu and T.W. Kim, Hanyang Univ., Korea


Extraction of Subgap State Density in IGZO Thin-Film Transistors by Transmission Line Model Incorporated Conductance Method

M.C. Nguyen 1, A.H.-T. Nguyen 1, J. Kim 1, S.-W. Kim 1, S.-J. Choi 1, J.-K. Jun 1, H.M. Ji 1, J.-H. Kim 1, K.M. Yu 1, J.K. Jeong 2 and R. Choi, 1 Inha Univ. and 2 Hanyang Univ., Korea


Design of Multi-Layer Single-Electron Information-Processing Circuit for Nonlinear Problem Mimicking Foraging Behavior of Honeybees

T. Tanabe and T. Oya, Yokohama Natl. Univ., Japan


Effects of Trench Profile and SiO2 Spacer on Trench Sidewall 1.2 kV 4H-SiC Trench MOSFETs Employing Bottom Protection Well

O. Seok 1, M.-W. Ha 2, I.H. Kang 1, H.W. Kim 1, D.Y. Kim 1,3 and W. Bahng 1, 1 Korea Electrotechnol. Res. Inst., 2 Myongji Univ. and 3 Gyeongsang Natl. Univ., Korea


Hybrid Black Phosphorus-Quantum Dots Phototransistors

A.-Y. Lee 1, H.-S. Ra 1, D.-H. Kwak 1, M.-H. Jeong 1, J.-H. Park 1, Y.-S. Kang 1, W.-S. Chae 2, J.-S. Lee 1, 1 DGIST and 2 Korea Basic Sci. Inst., Korea


High Peak-to-Valley Current Ratio Tunnel Diodes with Chemically Doped MoTe2/MoS2 Heterostructure

N.T. Duong, S.H. Bang, D.X. Dang, Y.H. Lee, S.C. Lim and M.S. Jeong, Sungkyunkwan Univ., Korea


Scaling of Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films for Nextgeneration FRAM Applications

S.J. Kim 1, J. Mohan 1, S.R. Summerfelt 2, T. San 2, L. Colombo 2 and J. Kim 1, 1 Univ. of Texas and 2 Texas Instruments, USA


Characteristics of the Nano Structured P-I-N Gate FinFET for 1T DRAM

S.-I. Kim 1, Y.T. Kim 1, C.K. Kim 1 and F. Gamiz 2, 1 KIST, Korea and 2 Univ. of Granada, Spain


Memory Performance of Z2-FET Fabricated on 7nm SOI Substrate

Y.T. Kim 1, S. Kwon 1,2, M. Choi 2, P. Galy 3 and J. Ahn 2, 1 KIST, 2 Hanyang Univ. and 3 ST Microelectronics, Korea


Fabrication of Hybrid Quantum Dots/Monolayer MoS2 Photodetector

S. Cho, H. Woo, J. Kim, Y. Jo, S. Lee, J. Seo, H. Kim and H. Im, Dongguk Univ., Korea


Improving Electrochromic and Electrochemical Energy Storage properties in WOx with an Embedded Metallic Nanofilaments array

J. Kim, S. Lee, S. Cho, Y. Jo, H. Woo, H. Kim and H. Im, Dongguk Univ., Korea


Gate-Tunable 2D Memristor Devices Based on Monolithically-Integrated Heterojunctions

W. Huh 1, S.H. Jang 1, J.Y. Lee 1, D. Lee 1, H.Y. Jeong 2, G. Wang 1, C.-H. Lee 1, 1 Korea Univ. and 2 UNIST, Korea


Improvement of Out-Coupling Efficiency in Organic Emitting Diodes using TiO2 micro to nano structures

P.-H. Jung , Y.H. Sung, S.J. Kim, Y. Kim, W.-J. Kim and H. Lee, Korea Univ., Korea


Workfunction Engineering of Pocket Tunnel Field-Effect Transistor with Dual Material Gate

J.C. Lee, T.J. Ann and Y.S. Yu, Hankyong Natl. Univ., Korea


2-3: Nanofabrication



Fabrication of Hierarchical-Architectured Silicon with Superior Antireflective and Self-Cleaning Ability for Photovoltaics Applications

B. Dudem, J.W. Leem and J.S. Yu, Kyung Hee Univ., Korea


Direct Laser Writing Using a CW Laser Diode for Microstructures in a Microchannel

D. Jung 1, G.-H. Kim 1,2, K. Choi 1,2, S. Kwon 2, S. Lee 2, J. Lee 1,2 and H. Lim 1,2, 1 UST and 2 KIMM, Korea


Size Effects on Optical Properties of CdSe and CdSe/CdS Nanoheterostructures

S.H. Kim, M.T. Man and H.S. Lee, Chonbuk Natl. Univ., Korea


Surface-Enhanced Raman Scattering Based on Hybrids Consisting of Plasmonic Silver Arrays-Satellite Ag Prisms

W. Inoue, H. Takeda, K. Sugawa, K. Takase and J. Otsuki, Nihon Univ., Japan


Plasmonic Structure on GaAs Substrate by 3-Dimensional Finite-Difference Time-Domain Method

G. Oh and E.K. Kim, Hanyang Univ., Korea


Fabrication of High Conductivity of TTF-F4TCNQ Charge Transfer Complexes with High Crystallinity by Eutectic Melting Method

J. Kim 1,2, S. Kwon 1, Y. Kang 2 and J. Lee 1, 1 KIMM and 2 Hanyang Univ., Korea

9P-12-36 Withdrawn


9P-12-37  Withdrawn

Synthesis of NiNW/ Cellulose Hybrid Structure and Their Adsorption Behavior

S.R. Shmsuri 1, S. Shiomi 2 and E. Matsubara 1, 1 Kyoto Univ. and 2 Kyoto Municipal Inst. of Industrial Technol. and Culture, Japan


Investigation of Surface Potentials in Reduced Graphene Oxide Flake by Kelvin Probe Force Microscopy

R. Negishi, K. Takashima and Y. Kobayashi, Osaka Univ., Japan


Effects of Stacked Layers on Optical Properties in Multilayer Quantum Dots

S.H. Ju 1, J.C. Choi 1 and H.S. Lee 2, 1 Yonsei Univ. and 2 Chonbuk Natl. Univ., Korea


Structural and Optical Properties of CdTe/ZnTe Quantum Dots on Si Substrates

K.H. Lim 1, J.C. Choi 1 and H.S. Lee 2, 1 Yonsei Univ. and 2 Chonbuk Natl. Univ., Korea


Synthesis of MO1-xWxS2 on CNT Yarn for High Performance Freestanding Electrode Hydrogen Evolution Reaction

D.A. Nguyen, T.S. Le, D.S. Suh and M.S. Jeong, Sungkyunkwan Univ., Korea


Synthesis of Ni Nanowire/ Cellulose Hybrid Structure via Liquid Phase Reduction

S.R. Shamsuri 1, S. Shiomi 2 and E. Matsubara 1, 1 Kyoto Univ. and 2 Kyoto Municipal Inst. of Industrial Technol. and Culture, Japan




2-4: Inorganic Nanomaterials

Chair: J.S. Kim (Yeungnam Univ.)


Preparation and Characterization of Alginate Based-Magnetic Nanoparticles for Fluorescence/Magnetic Resonance Multimodal Imaging Applications

Y.-S. Kwon 1,2, E.-J. Won 2, K.-B. Choi 1, T.-J. Yoon 2 and J.-J. Lee 1, 1 KIMM and 2 Ajou Univ., Korea


Fabrication of ZnO-ZnS@polyaniline Nanohybrid on FTO Glass for Enhanced Hydrogen Generation

A. Brayek, H. Kim and B. Yang, Kumoh Natl. Inst. of Technol., Korea


What is the Band Offsets of PANI/ZnS/ZnO Heterojunctions ?

A. Brayek, H. Kim and B. Yang, Kumoh Natl. Inst. of Technol., Korea


Two-Dimensional Vertical Heterostructure for Efficient Bandgap Modulation of Black Phosphorus

T. Eum, S. Song, M. Neumann, D.S. Chung and Y.H. Lee, Sungkyunkwan Univ., Korea


Toward Ultraclean 2D Heterostructure Interfaces: h-BN As a Novel Tool to Visualize Organic Residues

X. Wei, M. Neumann, S.H. Song and Y.H. Lee, Sungkyunkwan Univ., Korea


Tuning of the Optical Properties of Self-Assembled InAs/GaAsSb Quantum Dots Using InAs Stressor Layers

Y. Kim, J.O. Kim, S.K. Noh and S.J. Lee, Korea Res. Inst. of Standards and Sci., Korea


Optical Transitions of Organic-Inorganic Perovskite Crystals under Pulsed Magnetic Fields

Y. Kim 1, Y.H. Shin 1, M.S. Jeong 2, Y. Kohama 3 and H. Nojiri 4, 1 Dankook Univ., 2 Sung Kyun Kwan Univ., 3 Univ. of Tokyo and 4 Tohoku Univ., Japan


Low Temperature Growth of High Quality GaN Barrier for an InGaN/GaN Multiple Quantum Well Structure

H. Woo 1,2, J. Kim 2, S. Cho 2, Y. Jo 2, C.H. Roh 1, J.H. Lee 1, J. Park 3, H. Kim 2, H. Im 2 and C.-K. Hahn 1, 1 Korea Electronics Technol. Inst., 2 Dongguk Univ. and 3 Korea Univ., Korea


Enhanced Photocatalytic Degradation of Volatile Organic Compounds by the Hybridization of B-Ga2O3 and Reduced Graphene Oxide

H.J. Bae, S. Kim, I.G. Lee and W.S. Hwang, Korea Aerospace Univ., Korea


Optical Imaging of Two-Dimensional MoS2

H. Kim 1, S.M. Kim 2 and H. Rho 1, 1 Chonbuk Natl. Univ. and 2 KIST, Korea


Solution-Processed High-κ Dielectrics for Low-Operating Voltage Organic and Inorganic Field-Effect Transistors

S.Y. Park, J. Heo, J. Kim, S. Song, Y.J. Yoon, J. Jung, H. Jang, K.T. Lee, J. Seo, B. Walker and J.Y. Kim, UNIST, Korea


Enhanced Polarization and Leakage Current Properties for Bismuth Titanate Ceramic Films Prepared by Aerosol Deposition Method

M. Suzuki, T. Tsuchiya and J. Akedo, AIST, Japan


Exploring Transparent Metal and Metal-Oxide Material for Transparent Cathode in Highly Efficient Transparent OLEDs

B.H. Choi and J.H. Lee, KITECH, Korea


Optical Characterization of AlGaAs/GaAs Multiple Quantum Wells

J. Cho 1, L. Ali 1, J.D. Song 2, J.S. Kim 3, H.-J. Jo 3, H. Kim 4, J.-H. Kim 4, M.S. Jeong 4 and C.C. Byeon 1, 1 Kyungpook Natl. Univ., 2 KIST, 3 Yeungnam Univ. and 4 Sungkyunkwan Univ., Korea


Surface Modifications of Titanium Oxide Thin Films by Plasma Treatment

J.-S. Kim, H. Jeek and H.-W. Seo, Jeju Natl. Univ., Korea


Ag Nanowire Embedded Flexible Transparent Electrode

C.S. Kim, KIMS, Korea