Monday, November 6

Room A (Ramada Ballroom 1, 2F)

18:00-20:00 Welcome Reception

Tuesday, November 7

Room A (Ramada Ballroom 1, 2F)

7P-1: Plenary Session I

Cnairs: J. Ahn (Hanyang Univ.) and K. Ishibashi (RIKEN)

7P-1-0 9:30-10:00

Opening Remarks: E.K. Kim (Hanyang Univ.)

Award Presentation: S.H. Choi (Kyung Hee Univ.) and E.K. Kim (Hanyang Univ.), MNC 2016 Outstanding Paper, Most Impressive Presentation, Most Impressive Poster and Young Author's Award

Local Announcement from Committee: J. Ahn (Hanyang Univ.)

7P-1-1  10:00-10:40

(Plenary)

S. Salahuddin, Univ. of California, Berkeley, USA

7P-1-2 10:40-11:20

Progress and Perspective of Nano Imprint Lithography for Production in Semiconductor Devices (Plenary)

T. Higashiki, Toshiba Memory, Japan

7P-1-3  11:20-12:00

2D Materials: Crystal Growth for Future Device Structures (Plenary)

L. Colombo, Texas Instruments, USA

Lunch

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

7A-2: Nano-Scale Transistors (13:30-15:20)

Chairs:

S. Kim (Samsung Electronics) W.S. Hwang (Korea Aerospace Univ.)

7B-2: Graphene: Materials, Characterization and Applications (13:30-15:50)

Chairs:

J.-H. Ahn (YonseiUniv.)

R. Negishi (Osaka Univ.)

7C-2: Organic Nanomaterials I (13:30-15:30)

Chairs:

T. Sakanoue (Nagoya Univ.)

C. Pang (SKKU)

7D-2: Nanoimprint, Nanoprint and Rising Lithography (13:30-16:00)

Chairs:

S. Kang (Yonsei Univ.)

H. Lee (Korea Univ.)

7A-2-1

13:30

Impacts of Traps on Nano Scale Device Performance, Reliability, and Novel Applications (Invited)

J. Chen 1, J. Wu 1,2 and X. Jiang 1,2, 1 Shandong Univ. and Chinese Academy of Sci., China

7B-2-1

13:30

Nanocarbon/Metal Composites for Advanced Electronics Applications (Invited)

S.H. Lee, KIST, Korea

7C-2-1

13:30

Conductive Stretchable Polymer Composites Useful for Wearable Electronics (Invited)

U. Jeong, POSTECH, Korea

7D-2-1

13:30

Enhancement of Light Extraction Efficiency in Various Photonic Devices with Imprinted

Nano-Structures (Invited)

Y. Kim and H. Lee, Korea Univ., Korea

7A-2-2

14:00

Numerical Analysis of Band Tailing and Electron Transport Near Conduction Band Edge in Doped Si Nanowires

T. Tanaka and K. Uchida, Keio Univ., Japan

7B-2-2

14:00

Electrical and Magnetic Characteristics of Randomly Stacked CVD Graphene

K. Uemura 1, T. Ikuta 1, T. Ono 2, Y. Kanai 2, K. Inoue 2, K. Matsumoto 2, T. Hihara 3 and K. Maehashi 1, 1 Tokyo Univ. of Agriculture and Technol., 2 Osaka Univ. and 3 Nagoya Inst. of Technol., Japan

7C-2-2

14:00

Prospective Study CT Nanocrystals for Organic Solar Cells (Invited)

A. Masuhara, Yamagata Univ., Japan

7D-2-2

14:00

Emergent Magnetic Order in Artificial Spin Structures (Invited)

B. Hjörvarsson, Uppsala Univ., Sweden

7A-2-3

14:20

Single Electron Transistor Characteristics of Fe-MgF2 Single-Layer Granular Films

Y. Asai, S. Honjo, A. Tsurumaki-Fukuchi, M. Arita and Y. Takahashi, Hokkaido Univ., Japan

7B-2-3

14:20

Field Emission Properties of Edge-Functionalized Graphene Nanoribbon

Y. Gao and S. Okada, Univ. of Tsukuba, Japan

7C-2-3

14:30

Room Temperature-Operating PbS QD Based Infrared Sensor by Using Bandgap Manipulation

S. Kim and K. Lee, Ajou Univ., Korea

7D-2-3

14:30

Fabrication of Spatially Aligned Silicon Nanotubes and Palladium Nanogaps and Their Applications (Invited)

Y. Pak, H.S. Jeong, Y. Jeong and G.-Y. Jung, GIST, Korea

7A-2-4

14:40

Potential and Drain Current Model For L-Shaped Tunnel Field Effect Transistor

F. Najam and Y.S. Yu, Hankyong Natl. Univ., Korea

7B-2-4

14:40

Fracture Nanomechanics of Graphene (Invited)

T. Kitamura 1 and B. Jang 2, 1 Kyoto Univ., Japan and 2 KIMM, Korea

 

7C-2-4

14:50

Novel Core-Shell Type Hybridized Nanoparticles for Polymer Electrolyte Membrane

K. Shito 1, S. Sekine 1, Y. Takahashi 1, T. Arita 2 and A. Masuhara 1, 1 Yamagata Univ. and 2 Tohoku Univ., Japan

7D-2-4

15:00

Fabrication of Au Split-Ring Resonator Arrays by Reverse-Tone Lithography Using a Print-and Imprint Method

T. Uehara, S. Sato, S. Ito, H. Yano, T. Nakamura and M. Nakagawa, Tohoku Univ., Japan

7A-2-5

15:00

Study on the Origin of Vth Fluctuation Caused by Ion Implantation to Source and Drain Extensions of SOI Tri-Gate FinFETs by 3D Process and Device Simulations

T. Tsutsumi, Meiji Univ., Japan

7B-2-5

15:10

Resonance Control of Graphene Mechanical Resonator in Nonlinear Resume by Standing Wave of Light

T. Inoue, Y. Anno, Y. Imakita, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan

7C-2-5

15:10

Investigation of Lattice Strain Changes in Bandgap Modulated Perovskite Single Crystals

D. Park, H. Byun, A.Y. Lee, H.M. Choi, S.C. Lim and M.S. Jeong, Sungkyunkwan Univ., Korea

7D-2-5

15:20

Molecular Dynamics Study on Polymer Slipping under Shear Flow in Nanofabrication Processes

K. Tada 1, Y. Miyashita 1, M. Yasuda 2 and Y. Hirai 2, 1 Natl. Inst. of Technol., Toyama College and 2 Osaka Pref. Univ., Japan

 

7B-2-6

15:30

Wearable Three Dimensional Capacitive Touch Sensor Based on Graphene

M. Kang and J.-H. Ahn, Yonsei Univ., Korea

7D-2-6

15:40

Evaluation of Meniscus Behavior under Helium for Rapid Resist Spreading

H. Kashiwagi, N. Sato, M. Hatano, W. Jung, T. Kono and T. Nakasugi, Toshiba Memory, Japan

7A-2 Author's Interview:

17:40-17:50

7B-2 Author's Interview:

18:00-18:10

7C-2 Author's Interview:

17:50-18:00

7D-2 Author's Interview:

16:00-16:10

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

7A-3: Advance Nano Memory Devices (15:40-17:40)

Chairs:

W.S. Hwang (Korea Aerospace Univ.)

J. Chen (Shandong Univ.)

7B-3: 2D Materials for Electronic Applications (16:00-18:00)

Chairs:

J. Ando (AIST)

J.-H. Ahn (YonseiUniv.)

7C-3: Organic Nanomaterials II (15:50-17:50)

Chairs:

A. Masuhara (Yamagata Univ.)

U. Jeong (POSTECH)

7D-3: Inorganic Materials I (16:20-17:50)

Chairs:

J.-S. Kim (Yeungnam Univ.)

K. Nakamura (Kyoto Univ.)

7A-3-1

15:40

ReRAM Switching in Planar-Type Structures of Ag/WOx/Pt Studied by in-Situ TEM

S. Sakai, S. Muto, A. Tsurumaki-Fukuchi, M. Arita and Y. Takahashi, Hokkaido Univ., Japan

7B-3-1

16:00

Polyelectrolyte-Gated Vertical Schottky-Barrier Transistors  (Invited)

J.H. Cho, Sungkyunkwan Univ., Korea

7C-3-1

15:50

Bright Polymer Light-Emmitting Electrochemical Cells Based on Ionic Liquids (Invited)

T. Sakanoue, Nagoya Univ., Japan

7D-3-1

16:20

Spin Transfer Dynamic in III-V Compound Semiconductor Quantum Dots Integrated with Layered Quantum Structures (Invited)

A. Maruyama, Hokkaido Univ., Japan

7A-3-2

16:00

Resistive Switching Dependence on the Stacking Sequence of IGZO and SnO2 Heterojunction Memory Devices

Y. Abbas 1, A. Ali 2, J. Jongwan 2 and C. Choi 1, 1 Hanyang Univ. and 2 Sejong Univ., Korea

7B-3-2

16:30

N-GQD Doped WO3 for Electrochromic Devices

A. Hasani, Q.V. Le, T.P. Nguyen and S.Y. Kim, Chung-Ang Univ., Korea

7C-3-2

16:20

Bioinspired Multiscale Architectures for Skin-Patches and Wearable Devices (Invited)

S.Y. Baik and C. Pang, SKKU, Korea

7D-3-2

16:50

Radiative Decay Time of Center-of-Mass Exciton Confinement States in a Single CdTe/CdMnTe Quantum Well

W. Lee 1, M. Kim 1, H. Yang 1, K. Kyhm 1, A. Maruyama 2, K. Kheng 3, H. Mariette 3 and L.S. Dang 4, 1 Pusan Natl. Univ., Korea, 2 Hokkaido Univ., Japan, 3 CEA, France and 4 CNRS, France

7A-3-3

16:20

The Effects of Plasma Irradiation on the Resistive Switching of HfOx-Based RRAM

B. Ku, Y. Abbas and C. Choi, Hanyang Univ., Korea

7B-3-3

16:50

Diode Characteristics of Graphene-GaN Heterojunction with h-BN Interfacial Layer

G. Kalita, M. Kobayashi, M.D. Shaarin, R. Mahyavanshi and M. Tanemura, Nagoya Inst. of Technol., Japan

7C-3-3

16:50

Halogen Tuning Effect on Raman Shifts of Hybride Perovskite Single Crystals

A. Lee, D. Park and M.S. Jung, Sungkyunkwan Univ., Korea

7D-3-3

17:10

Periodically Diameter-Modulated Semiconductor Nanowires for Enhanced Optical Absorption

M. Ko, S.-H. Baek, B. Song, J.-W. Kang and C.-H. Cho, DGIST, Korea

7A-3-4

16:40

Resistive Switching Parameter Improvement of Pt/HfO2/Pt Resistor by Applying Voltage Bias Polarity

Y.C. Jung, S. Seong, T. Lee, S.Y. Kim, I.-S. Park and J. Ahn, Hanyang Univ., Korea

7B-3-4

17:10

Van der Waals Heterostructure Based on Two-Dimensional Atomic Crystals (Invited)

Y.-J. Yu, ETRI, Korea

 

7C-3-4

17:10

Efficient Polymer Protection for Hybrid MAPbI3 Perovskite Photodetectors

H. Kim, H.R. Byun, B. Kim, S.H. Kim, H.M. Oh and M.S. Jeong, Sungkyunkwan Univ., Korea

7D-3-4

17:30

Growth Mechanism and Structure Determination of TiSeTe Single Crystals – A New Ternary Phase of Transition Metal Chalcogenides

A.K. Dasadia 1, B.B. Nariaya 2 and A.R. Jani 2, 1 A.D. Patel Inst. of Technol. and 2 Sardar Patel Univ., India

7A-3-5

17:00

Engineering Digital to Analog Resistive Switching of HfOx-Based RRAM by Inserting TaOy for Synaptic Behavior

S. Kim, Y. Abbas and C. Choi, Hanyang Univ., Korea

7B-3-5

17:40

Effect of Buffer Layer on Photoresponse of MoS2 Phototransistor

Y. Miyamoto, D. Yoshikawa, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan

7C-3-5

17:30

Light Soaking Effect in Organic-Inorganic Mixed Halide Perovskite Single Crystals

H.R. Byun 1, D.Y. Park 1, H.M. Oh 1, G. Namkoong 2 and M.S. Jeong 1, 1 Sungkyunkwan Univ. and 2 Old Dominion Univ., USA

7A-3-6

17:20

Forming-Free Resistive Swithching Characteristics in MnO/Ta2O5 Based Crossbar Array Structure

Q. Hu, T.S. Kang, H. Abbas, T.S. Lee, N.J. Lee, M.R. Park, T.-S. Yoon and C.J. Kang, Myongji Univ., Korea

 

 

7A-3 Author's Interview:

17:40-17:50

7B-3 Author's Interview:

18:00-18:10

7C-3 Author's Interview:

17:50-18:00

7D-3 Author's Interview:

17:50-18:00

Wednesday, November 8

Room A (Ramada Ballroom 1, 2F)

8P-4: Plenary Session II

Chairs: S.H. Choi (Kyung Hee Univ.)

8P-4-1  8:30-9:10

Two-Dimensional van der Waals Layered Heterostructures: Progress and Challenges (Plenary)

Y.H. Lee, Sungkyunkwan Univ., Korea

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

8A-5: Optoelectronic Devices (9:20-10:30)

Chairs:

C.-H. Cho (DGIST)

8B-5: Nanocarbon Characterization (9:20-10:50)

Chairs:

M. Tanemura (Nagoya Inst. of Technol.)

S.Y. Kim (Chung Ang Univ.)

8C-5: Resist and Directed Selef-Assembly I (9:20-10:40)

Chairs:

T. Azuma (EIDEC)

S.-J. Jeong (SAIT)

8D-5: Microsystem Technology and MEMS I (9:20-10:50)

Chairs:

J. Lee  (Sogang Univ.)

S. Nagasawa (Shibaura Inst. of Technol.)

8A-5-1

9:20

Transparent and Flexible Ultraviolet Photoconductors Using Low Temperature Processes of Multidimensional Nanostructures (Invited)

T.V. Cuong 1,2, K.K. Bok 2, D.T. Thanh 2 and C.-H. Hong 2, 1 Vietnam Natl. Univ., Vietnam and 2 Chonbuk Natl. Univ., Korea

8B-5-1

9:20

Two Color Two Photon Excited Photoluminescence of Graphene-Rhodamine 6G Conjugated System (Invited)

H. Kim, DGIST, Korea

8C-5-1

9:20

Next Generation Lithography for Sub-20nm Half Pitch Patterning (Invited)

H.-W. Kim, J. Park, S.S. Yi, S.Y. Woo, S. Yi, C.H. Park, J.Y. Kim and S.M. Park, Samsung Electronics, Korea

8D-5-1

9:20

The Quest for Next Generation MEMS and Nano-Devices: Nanoscale Thermal Energy Utilization and Advanced Materials Integration (Invited)

H.J. Kim, DGIST, Korea

8A-5-2

9:50

Demonstration of InGaAs Nanowire Array Photodiode on Si

K. Chiba, A. Yoshida, K. Tomioka and J. Motohisa, Hokkaido Univ., Japan

8B-5-2

9:50

Carbon Nanotube Tipped Cantilevers Applied to Nanometrology in Dynamic Mode Atomic Force Microscopy

J. Su, N.N. Chu, M.H. Shiao and C.N. Hsiao, Natl. Applied Res. Labs., Taiwan

8C-5-2

9:50

Reliable sub-10 nm Block Copolymers Development : Synthesis and Thermally Annealed Formation of Perpendicularly Orientated Lamellar Structures  (Invited)

T. Hayakawa 1, R. Nakatani 1, A. Chandra 1, Y. Yoshimura 1, Y. Seino 2, H. Sato 2, Y. Kasahara 2, T. Azuma 2, 1 Tokyo Inst. of Technol. and 2 EIDEC, Japan

8D-5-2

9:50

Evaluation of Arrangement Error of Micropore X-Ray Mirrors Due to Hot Plastic Deformation Process

D. Ishi 1, M. Numazawa 1, Y. Ezoe 1, K. Takeuchi 1, M. Terada 1, M. Fujitani 1, T. Itoyama 1, R. Otsubo 1,

A. Fukushima 1, T. Ohashi 1, K. Ishikawa 2, K. Mitsuda 2 and K. Morishita 3, 1 Tokyo Metropolitan Univ., 2 ISAS/JAXA and 3 Kyoto Univ., Japan

8A-5-3

10:10

Synthesis of Silver Particles-Reduced Graphene Oxide Composite As Photodetector

N.S.A. Aziz 1, Y. Nakajima 2, H. Sato 2, T. Maekawa 2 and A.M. Hashim 1, 1 Univ. Teknologi Malaysia, Malaysia and 2 Toyo Univ., Japan

8B-5-3

10:10

TEM Observation of Graphitization at 250oC for Amorphous Carbon Nanofibers Including Novel Catalyst Nanoparticles

M.I. Araby, S. Sharma, G. Kalita and M. Tanemura, Nagoya Inst. of Technol., Japan

8C-5-3

10:20

Directed Polymeric Assembly via Photo-Thermal Processes

H.M. Jin, S.K. Cha, J.H. Kim and S.O. Kim, KAIST, Korea

8D-5-3

10:10

Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating

T. Konishi 1,2,3, D. Yamane 2,3, T. Safu 1, C.-Y. Chen 2,3, T.-F.M. Chang 2,3, H. Ito 2,3, S. Dosho 2,3, N. Ishihara 2,3, M. Sone 2, 3, K. Machida 2,3, K. Masu 2,3, and S. Iida 1, 1 NTT-AT, 2 Tokyo Inst. of Technol. and 3 JST-CREST, Japan

8B-5-4

10:30

Energetics and Electronic Structures of Chemically Decorated C60 Chains

S. Furutani and S. Okada, Univ. of Tsukuba, Japan

8D-5-4

10:30

Stable Solutal-Marangoni Flows Around a Microbubble in Water/1-Butanol Mixtures

K. Namura and M. Suzuki, Kyoto Univ., Japan

8A-5 Author's Interview:

12:10-12:20

8B-5 Author's Interview:

10:50-11:00

8C-5 Author's Interview:

12:10-12:20

8D-5 Author's Interview:

12:30-12:40

Convention Lobby (2F)

Coffee Break

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

8A-6: Next Generation Nanodevices (10:50-12:10)

Chairs:

Y. Kim (Kyung Hee Univ.)

C.-H. Lee (Korea Univ.)

8B-6: Nanofabrication I (11:10-12:20)

Chairs:

J.J. Lee (KIMM)

K. Takase (Nihon Univ.)

8C-6: Resist and Directed Selef-Assembly II (11:00-12:10)

Chairs:

S.O. Kim (KAIST)

T. Nagai (JSR)

8D-6: Microsystem Technology and MEMS I (11:10-12:30)

Chairs:

R. Takigawa (Kyushu Univ.)

S.-H. Lim  (Kookmin Univ.)

 

 

8A-6-1

10:50

Hydrogen Ion Implantation-Based Wafer Bonding with Low Blister Formation Temperature (<450) for M3D Integration

H. Han, D. Lim, M.G. Chae, J. Lee, B. Ha and C. Choi, Hanyang Univ., Korea

8B-6-1

11:10

Fabrication of Large Scale Ni Nano-Patterned Roll Mold for Roll Printing Process (Invited)

G.H. Kim, H. Lim, K. Choi, S. Kwon and J. Lee, KIMM, Korea

8C-6-1

11:00

Carbohydrate-Based Block Copolymer Self-Assemblies: Sub_10nm Nanostructured Thin Films and DSA Patterning (Invited)

R. Borsali, Grenoble Alpes Univ.,Flance

8D-6-1

11:10

Fabrication of Silicon on Diamond Structure with an Ultra-Thin SiO2 Bonding Layer by Sputter Etching Method

M. Nagata, R. Shirahama, S. Duangchan and A. Baba, Kyushu Inst. of Technol., Japan

8A-6-2

11:10

Study of Unique Neural Network on Pulse Signal Generating and Propagating Medium

W. Zheng, F. Maehara and T. Oya, Yokohama Natl. Univ., Japan

8B-6-2

11:40

Laser Fabrication of High-Performance in-Plane Microsupercapacitors Based on Reduced Graphene Oxide Films

S. Kwon 1, D. Jung 1,2, H. Lim 1,2, G. Kim 1,2 J. Kim 1,2, K.-B. Choi 1,2 and J.J. Lee 1,2, 1 KIMM and 2 Univ. of Sci. and Technol., Korea

8C-6-2

11:30

Studies on Self-Assembling Processes of Block Copolymer Thin Films by Using Grazing

Incident Small-Angle X-Ray Scattering

M. Takenaka 1,2, T. Omosu 1,2, K. Yoshimoto 1, T. Hayakawa 3, T. Azuma 4, Y. Seino 4, H. Sato 4, Y. Kasahara 4, K. Kodera 4, K. Miyagi 4, M. Shiraishi 4, R. Matsuki 4, T. Kosaka 4, T. Himi 4 and S. Nagahara 4, 1 Kyoto Univ., 2 RIKEN Harima Inst. Res., 3 Tokyo Inst. of Technol. and 4 EIDEC, Japan

8D-6-2

11:30

Development of Process to Build Micro Channels with the Root Structure of The Plant

S. Nakashima, F. Tsumori, K. Tokumaru, K. Kudo and K. Shinagawa, Kyushu Univ., Japan

8A-6-3

11:30

The Effect of Bi Dopant in In3SbTe2 Phase-Change Material

M. Choi 1, H. Choi 2,3, S. Kwon 1, S. Kim 3, Y.T. Kim 3 and J. Ahn 1, 1 Hanyang Univ., 2 Virtual Lab and 3 KIST, Korea

8B-6-3

12:00

Ultrathin Ge Growth on Flat Ag Surface in Hetero-Epitaxial Ag/Ge Structure by Annealing

K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara and S. Miyazaki, Nagoya Univ., Japan

8C-6-3

11:50

Defect Dynamics of Micro-Phase Separation Process in Directed Self-Assembly of Block Copolymers

T. Azuma 1, Y. Seino 1, H. Sato 1, Y. Kasahara 1, K. Kodera1, K. Miyagi 1, M. Shiraisi 1, R. Matsuki 1, T. Kosaka 1, T. Himi 1, S. Nagahara 1, A. Chandra 2, R. Nakatani 2, T. Hayakawa 2, K. Yoshimoto 3, T. Omosu 3,4 and M. Takenaka 3,4, 1 EIDEC, 2 Tokyo Inst. of Technol., 3 Kyoto Univ. and 4 RIKEN Harima Inst. Res., Japan

8D-6-3

11:50

Room Temperature Impact Deposition of Ceramic by Laser Shock Wave

K. Jinno, F. Tsumori, K. Kudo and K. Shinagawa, Kyushu Univ., Japan

8A-6-4

11:50

Triboelectric Nanogenerator with Micropatterned Polymer for Efficient harvest of Mechanical Energy

B. Dudem and J.S. Yu, Kyung Hee Univ., Korea

8D-6-4

12:10

Effect of Ge Concentration on Poly SiGe Mechanical Properties

A. Uesugi 1, K. Maenaka 2 and T. Namazu 1, 1 Aichi Inst. of Technol. and 2 Univ. of Hyogo, Japan

8A-6 Author's Interview:

12:10-12:20

8B-6 Author's Interview:

12:20-12:30

8C-6 Author's Interview:

12:10-12:20

8D-6 Author's Interview:

12:30-12:40

Lunch

Convention Lobby (2F)

8P-7: 13:30-15:30 POSTER SESSION I

1-2: Electron and Ion Beam Technologies

Chair:

8P-7-1

Fabrication of Programmed Defects for Non-Imaging EUV Mask Inspection by Helium

Ion Beam Direct Milling

C.-L. Lee, S.-W. Chien and K.-Y. Tsai, Natl. Taiwan Univ., Taiwan

8P-7-2

Photomask Pattern Positional Error Improvement Using Convolution Neural Networks

Y.-S. Sung 1,2 and J.-H. Lee 1, 1 Sungkyunkwan Univ. and 2 Samsung Electronics, Korea

8P-7-3

Study on the Beam Extraction Characteristics of Inductively Coupled Plasma Source

for Focused Ion Beam

M.Y. Park 1, M.J. Park 1, K.H. Kim 1, J.H. Won 1 and D.Y. Jang 2, 1 KEMCTI and 2 Seoul Natl. Univ. of Sci. and Technol., Korea

8P-7-85L

Characterization of Microcolumn Using Modified Si Deflectors

H.W. Kim, Y.B. Lee, D.W. Kim, S.J. Ahn, T.S. Oh and H.S. Kim, Sun Moon Univ., Korea

1-3: Resist and Directed Self-Assembly

Chair: S.O. Kim (KAIST)

8P-7-4

Microwave Irradiation Effects for Contact Resistance with n-Doped Poly Si

J.-Y. Pyo and W.-J. Cho, Kwangwoon Univ., Korea

8P-7-5

3D Complicated Multimetal Nanomesh Patterns Fabricated from Perforated Lamellar Block Copolymer Self-Assembly

S.K. Cha, H.M. Jin, J.H. Kim and S.O. Kim, KAIST, Korea

8P-7-6

Conversion of 2D Self-Assembled BCP Pattern into Manifold 3D Structure by Chemically Modified Graphene Layer

J.H. Kim, J.Y. Kim, J. Lim, H.M. Jin and S.O. Kim, KAIST, Korea

8P-7-7

Multi Component Metal Nanowire Array by Using Block Copolymer Patterning and Reversible Ion Loading

G.G. Yang, J.H. Mun, S.K. Cha and S.O. Kim, KAIST, Korea

2-1 Nanocarbons

Chair:

8P-7-8

Improved Electrical Properties of Reduced Graphene Oxide Film by Water-Assisted Thermal Process

R. Negishi 1, T. Nakagiri 1, M. Akabori 2 and Y. Kobayahsi 1, 1 Osaka Univ. and 2 JAIST, Japan

8P-7-9

Anisotropic Surface Work Function of Graphene with Applying Electric Field

H.T. Kim1, D.J. Park 2, D.S. Shin 1, H.-S. Jang 1, B.H. Kim 1 and S.B. Choi 1, 1 Incheon Natl. Univ. and 2 Hallym Univ., Korea

8P-7-10

Energetics and Electronic Structure of Graphene Heterostructures via Substitutional Doping with B3N3

H. Sawahata 1, M. Maruyama 1, N.T. Cuong 2, H. Omachi 3, H. Shinohara 3 and S. Okada 1, 1 Univ. of Tsukuba, 2 NIMS and 3. Nagoya Univ., Japan

8P-7-11

Energetics of Edge Oxidization of Graphene Nanoribbons

A. Yasuma 1, A. Yamanaka 2 and S. Okada 1, 1 Univ. of Tsukuba and 2 Res. Organization for Infom. Sci. and Technol., Japan

8P-7-12

The Use of Patterned-MoS2 Nanosheets as Template and Transport Layers in Polarized Light Emitting Diodes

G.V. Le 1, G.J. Choi 2, K.S. Choi 3, K.C. Kwon 4, H.W. Jang 4, J.S. Gwag 2 and S.Y. Kim 1, 1 Chung-Ang Univ., 2 Yeungnam Univ., 3 Korea Basic Sci. Inst. and 4 Seoul Natl. Univ., Korea

8P-7-13

Synthesis and Characterization of One Dimensional Molybdenum Disulfide Wires Using Precipitation Techniques

S.-K. Lee, KIST, Korea

8P-7-14

In-situ Spectroscopic Monitoring of Heavy Metal Presented in the Industrial Wastewater

S. Kim, I.G. Lee, J.H. Seo and W.S. Hwang, Korea Aerospace Univ., Korea

8P-7-15

Chemical Vapor Deposition Synthesized Various Stacking-Oriented Multilayerd MOS2 Crystals

S.M. Shinde, K.P. Dhakal, X Chen and J.H. Ahn, Yonsei Univ., Korea

8P-7-16

Morphology and Electrical Studies on MoS2 Field-Effect Transistor after Ultraviolet Light Irradiation

A. Ando, J. Miyawaki, T. Kudo, AIST, Japan

8P-7-17

Mechanical Resonance Characteristics of MoS2 Mechanical Resonator

D. Yoshikawa, Y. Miyamoto, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan

 

2-2: Nanodevices

Chair: C.-H. Cho (DGIST)

8P-7-18

High-Voltage Lateral Double Implanted MOSFETs Implemented on HPSI 4H-SiC Substrates with Gate Field Plates

O. Seok 1, H.W. Kim 1, J.H. Moon 1, H.-S. Lee1,2 and W. Bahng 1, 1 KERI and 2 Kyeongsang Univ., Korea

8P-7-19

Single-Mode Lasing Action from Arbitrary Gain Materials

M. Umar, K. Min, S. Kim, M. Jo and S. Kim, Ajou Univ., Korea

8P-7-20

Temperature Imaging of Graphene/hBN Heterostructure under Current

H. Kim 1, D. Kim 2, M.-H. Bae 2 and H. Rho 1, Chonbuk Natl. Univ. and 2 Korea Res. Inst. of Standards and Sci., Korea

8P-7-21

High-Performance Perovskite Solar Cells Employing AuCl3-Doped-Graphene Transparent Conductiong Electrodes

S.W. Seo, H.S. Lee, J.M. Kim, J.H. Kim, C.W. Jang, S. Kim and S.-H. Choi, Kyung Hee Univ., Korea

8P-7-22

Ni/p-Cu2O/SiOx/n-SiC/n-Si/Al Nonvolatile pu Memory Diode with High Endurance Characteristics Fabricated by Sputtering of n-SiC and Reactive-Sputtering of SiOx Both at Room Temperature

A. Somura, T. Tsukamoto and Y. Suda, Tokyo Univ. of Agriculture and Technol., Japan

8P-7-23

Wafer-Scale Production of Highly Uniform Two-Dimensional MoS2 by Metal Organic Chemical Vapor Deposition

T.W. Kim 1, J. Mun 1, H. Park 1,2, D. Jung 1,2, M. Diware 1, C. Won 1, J. Park 2, S.H. Jeong 2, J.C. Shin 3, S.-W. Kang 1,4, 1 Korea Res. Inst. of Standards and Sci., 2 Kyungpook Natl. Univ., 3 Yeungnam Univ. and 4 Univ. of Sci. and Technol., Korea

8P-7-24

Resistive Switching Characteristics of Manganese Oxide Thin Film and Nanoparticles Assembly Hybrid Devices

H. Abbas 1, M.R. Park 1, Y. Abbas 2, Q. Hu 1, T.S. Kang 1, T.-S. Yoon 1 and C.J. Kang 1, 1 Myongji Univ. and 2 Hanyang Univ., Korea

8P-7-25

Reduction of Surface Oxide on Black Phosphorus by Chemical Treatment

D.-H. Kwak 1, H.-S. Ra 1, M.-H. Jeong 1, A-Y. Lee 1, J. Yang 2, J.-H. Lee 2 and J.-S. Lee 1, 1 DGIST and 2 GIST, Korea

8P-7-26

Enhanced Photoresponsivity of 2-D Monolayer Photodetector by Silver Nanowires

S. Bang 1, N.T. Duong 1, H.M. Oh 1, J. Lee 1, Y.-H. Cho 2,3, K. Yang 1, H. Kim 1, S.J. Yun 1, M.-K. Kwon 2, J.-Y. Kim 3, J. Kim 1 and M.S. Jeong 1, 1 Sungkyunkwan Univ., 2 Chosun Univ. and 3 KOPTI, Korea

8P-7-27

Gate Material Engineering for Two-Dimensional Layered Materials Based Field-Effect Transistors

D.S. Chung, T. Eum and Y.H. Lee, Sungkyunkwan Univ., Korea

8P-7-28

Evaluation of Low-Thermal Budget Microwave Irradiation Effect on Impurity Activation and Post Metal Annealing Processes in SOI-MOSFETs

G.Y. Lee and W.-J. Cho, Kwangwoon Univ., Korea

8P-7-29

Tri-State Resistive Switching Characteristics of MnO/Ta2O5 RRAM Device Controlled by Reset Voltage

N.J. Lee, T.S. Kang, Q. Hu, T.S. Lee, T.-S. Yoon and C.J. Kang, Myongji Univ., Korea

8P-7-30

Hexagonal Boron Nitride Encapsulated Tin Disulfide Transistor with Enhanced Interlayer Coupling

D. Chu and E.K. Kim, Hanyang Univ., Korea

8P-7-31

Adsorption State of Dopamine on MoS2 Observed from Transfer Characteristic for Highly Sensitive Biosensor

N.T. Trung 1, I. Tsukamoto 1, I.M. Alam 1, M.I. Hossain 1, T. Takaoka 1, T. Komeda 1, and A. Ando 2, 1 Tohoku Univ. and 2 AIST, Japan

8P-7-32

Electrical Properties of Hydrothermal Synthesized β-Ga2O3 Nanostructure

Y. Yoon, S. Kim, B.H. Kim, I. Park, I.G. Lee and W.S. Hwang, Korea Aerospace Univ., Korea

8P-7-33

Improved Output Performance of Triboelectric Nanogenerator by High Dielectric Nanoparticle Embedded PDMS

H.-W. Park 1,2, D. Choi 2 and K.-B. Chung 1, 1 Dongguk Univ. and 2 Kyung Hee Univ., Korea

2-3: Nanofabrication

Chair:

8P-7-34

Deposition of Fine Width Metal Line Using Laser-Induced Forward Transfer

J.-G. Cheon, M.-C. Nguyen, A.H.-T. Nguyen, S.-Y. Han, J.-Y. Kim, S.-J. Choi, H.-M. Ji, S.-W. Kim, K.-M. Yu, J.-H. Kim and R. Choi, Inha Univ., Korea

 

 

8P-7-35

Formation of Multi-Stacked Ge Quantum Dot by Using Strain-Compensating Si1-xCx Spacer and Carbon Mediation

Y. Itoh 1,2, M. Arita 1, T. Kawashima 1 and K. Washio 1, 1 Tohoku Univ. and 2 JSPS, Japan

8P-7-36

Fabrication and I-V Characteristic of Ag-Ag2S Core-Shell Nanoparticles

Y. Amamoto, Hadiyawarman and H. Tanaka, Kyushu Inst. of Technol., Japan

8P-7-37

Highly Aligned Nanofibers by Electrospinning onto Preplaced Dielectric Particles

S. Li and B.-K. Lee, Chonnam Natl. Univ., Korea

8P-7-38

Use of EBL, Dot-Matrix and DLW for Fabrication of True Color Rainbow Hologram, OVD, Micro-Nanooptics... Designed by s/w "RainBow"

M. Knyazev 1, A. Svintsov 1, S. Zaitsev 1, N. Gusseinov 2 and M. Gabdullin 2, 1 Inst. of microelectronics technol. RAS and 2 Al-Farabi Kazakh Natl. Univ., Kazakhstan

8P-7-39

Continuous Fabrication of Plasmonic Wideband Infrared Absorber Film via Photo-Roll Lithography

M. Kim and M.K. Kwak, Kyungpook Natl. Univ., Korea

8P-7-40

Hierarchical Structure Foldable Membrane Using Hygroscopic Actuation

J. Bae 1, H. Cho 2, H.S. Kang 2, G. Wu 2, J.C. Jollu 2, S. Yang 2 and W. Park 1, 1 Kyung Hee Univ. and 2 Univ. of Pannsylvania, USA

8P-7-41

Influence of Gold-Silver Rough Surface Nanoparticles on Plasmonic Light Scattering in Organic Solar Cells

Q.N. Tran, H.S. Kim and S.J. Park, Gachon Univ., Korea

8P-7-42

Fabrication and Characterization of Bimetal Nanowires

R. Akutsu, T. Aono, K. Takeda, K. Sugawa and K. Takase, Nihon Univ., Japan

8P-7-43

Nanoinjection Molding of High Resolution Surface Patterns on 3D Objects

W.L. Lee, J. Wu and H.Y. Low, Singapore Univ. of Technol. and Design, Singapore

8P-7-44

In-situ Observation of Metastable Oxide Decomposition Area on Si(110) Surface

M. Yano 1, Y. Uozumi 2, S. Yasuda 1 and H. Asaoka 1, 1 JAEA and 2 Hitachi Power Solutions, Japan

8P-7-45

Evaluation of Mn-Doped ZnO Thin Films Formed by RF Magnetron Sputtering

N. Minowa, Y. Tamamoto, Y. Zhang, S. Guan and X. Zhao, Tokyo Univ. of Sci., Japan

2-5: Organic Nanomaterials

Chair: T.W. Lee (SNU)

8P-7-46

Self-Assembled Chiral Organic Nanowires for Chiroptical Sensing Applications

I. Song, X. Shang, Y.H. Lee, J.H. Jung, and J.H. Oh, POSTECH, Korea

8P-7-47

High-Performance Piezoresistive Pressure Sensors Based on Three-Dimensional Electrospun Nanofibers

O.Y. Kweon and J.H. Oh, POSTECH, Korea

8P-7-48

Fabrication and Characterization of Dichroic Fine Crystals by the Reprecipitation Method

T. Iino 1, S. Mori 2, K. Shito 1, H. Watanabe 1, A. Kimura 3, Y. Morishita 3 and A. Masuhara 1, 1 Yamagata Univ., 2 Hitachi and 3 Hitachi Chemical, Japan

8P-7-49

Synthesis of Benzothiadiazole (BT)-Based Polymers and Their Photovoltaic Applications

N.G. An 1, M.A. Uddin 2,3, Y. Li 2,3, H.W. Cho 1, H.Y. Woo 2 dnd J.Y. Kim 1, 1 UNIST, 2 Korea Univ. and 3 Pusan Natl. Univ., Korea

8P-7-50

A Deconvoluted PL Approach to Probe the Charge Carrier Dynamics of the Grain Interior and Grain Boundary of a Perovskite Film for Perovskite Solar Cell Applications

H.J. Jeong 1, A.A. Mamun 2, T.T. Ava 2, M.S. Jeong 1 and G. Namkoong 2, 1 Sungkyunkwan Univ., Korea and 2 Old Dominion Univ., USA

 

 

 

2-6: NanoTool

Chair: R. Kometani (Univ. of Tokyo)

8P-7-51

Surface-Enhanced Raman Spectroscopy of Adenine Molecule Using Single Dimer of Gold Nanoparticles

K. Maruoka, K. Ikegami, K. Sugano and Y. Isono, Kobe Univ., Japan

8P-7-52

Light Transmission Through Ultrasmall Nanohole with Plasmonic Groove Structure

H.T. Kim 1, S.B. Choi 1, S.S. Choi 2 and D.J. Park 3, 1 Incheon Natl. Univ., 2 Sun Moon Univ. and 3 Hallym Univ., Korea

8P-7-53

Development of Novel EUV Actinic Inspection Technique: EUV Scanning Lensless Imaging (ESLI)

D.G. Woo, Y.W. Kim, J.H. Kim, S.H. Shin, W.-Y. Kim and J. Ahn, Hanyang Univ., Korea

8P-7-54  Withdrawn

The Development of Thin Film Thickness Measurement System by Using Soft X-Ray Reflectivity Technology

C.T. Liu, G.D. Chen, T.T. Chen and B.C. He, ITRI, Taiwan

8P-7-55

NIL Products Have Begun to See the Light of the World: Star Products of NIL

M.K. Kwak, Kyungpook Natl. Univ., Korea

8P-7-56

Investigation of Individual Weight of Parameters on Combined Standard Uncertainty of Nanoscale Measurements According to ISO Standards

C.Y. Su, Y.H. Lin, S.S. Pai, P.L. Chen, N.N. Chu, C.C. Yang and M.H. Shiao, Natl. Applied Res. Labs., Taiwan

8P-7-86L

Submicron-Resoluved Luminescence Imaging for Detection of Grain Anisotropy Induced Stress in AL2O3 by Near-Field Spectroscopy

T. Tomimatsu 1 and R. Takigawa 2, 1 Tohoku Univ. and 2 Kyushu Univ., Japan

8P-7-87L

Revealing Defect-Induced Raman Mode of Monolayer Tungsten Disulfide via Tip-Enhanced Raman Spectroscopy

C. Lee, B.G. Jeong, S.J. Yun, Y.H. Lee, S.M Lee and M.S. Jeong, Sungkyunkwan Univ., Korea

3: Nanoimprint, Nanoprint and Rising Lithography

Chair: H. Lee (Korea Univ.)

8P-7-57

Self-Aligned, High Resolution Conductive Lines on Microstructured Imprinted Substrate

V.M. Di Pietro, H. Außerhuber and M. Mühlberger, Profactor, Austria

8P-7-58

Fabrication of Silicone Grating by Two-Beam Interference Method and Imprint Lithography

Y. Ikeda, T. Higuchi and I. Yamada, Univ. of Shiga Pref., Japan

8P-7-59

Development of UV-Curable Liquid for in-Liquid Fluorescence Alignment in Ultraviolet Nanoimprint Lithography

K. Ochiai, M. Kumagai, E. Kikuchi, T. Nakamura and M. Nakagawa, Tohoku Univ., Japan

8P-7-60

Infiltration Behaviors of AlOx into Positive-Tone Electron Beam Resists by Sequential Infiltration Synthesis

Y. Ozaki, S. Ito, N. Hiroshiba, T. Nakamura and M. Nakagawa, Tohoku Univ., Japan

8P-7-61

Nanoimprint System Development and Status for High Volume Semiconductor Manufacturing

H. Namba, Canon, Japan

8P-7-62

Fabrication of Nanocrystal Based Metamaterials

H.-W. Yun 1, S.-J. Kim 1, M.-H. Kim and S.-H. Hong 2, 1 Korea Univ. and 2 ETRI, Korea

8P-7-63

Study on Induced Strain Distribution in Direct Nanoimprint Lithography

K. Watanabe, T. Iida, M. Yasuda, H. Kawata and Y. Hirai, Osaka Pref. Univ., Japan

8P-7-64

Study on Control of Interfacial Pattern of Imprinted Multi-Layered Material

K. Yonekura, F. Tsumori, K. Tokumaru, K. Kudo and K. Shinagawa, Kyushu Univ., Japan

 

 

 

8P-7-88L

Various Applications of Imprint Processes by Use of PV A/PET Mold

H. Kawata, K. Uchida, M. Yasuda, and Y. Hirai, Osaka Pref. Univ., Japan

8P-7-89L

Improving Conversion Efficiency of PV Module Using Flexible and Three-Dimensional Structured Anti-Reflective Film

D. Huh, M. Byun, K. Kim, J. Jun, J. Park and H. Lee, Korea Univ., Korea

8P-7-90L

Fabrication of Nano to Micro Scale-Patterns of Hematite (Fe2O3) Nanoparticle Using Direct Printing Technique

S. Son, J. Park, S. Ju, D. Chae and H. Lee, Korea Univ., Korea

8P-7-91L

Chip-Scale Pattern Modification Method to Equalize Residual Layer Thickness in Nanoimprint Lithography

S.-W. Youn, K. Suzuki and H. Hiroshima, AIST, Japan

4: BioMEMS, Lab on a Chip

Chair: A. Matsumoto (Tokyo Medical and Dental Univ.)

8P-7-65

Differential-Mode Extended-Gate HEMT-Type Biosensor for the Detection of Streptavidin-Biotin Complexes

H.H. Lee, H.-M. Jeong, S.-W. Kang and J.-K. Shin, Kyungpook Natl. Univ., Korea

8P-7-66

Effect of Surface Micropattern on Domain Formation in Supported Lipid Bilayer

K. Dendo and K. Furukawa, Meisei Univ., Japan

8P-7-67

Detection of Bull Sperm for Counting Single Cell

C. Phiphattanaphiphop, K. Leksakul and R. Phatthanakun, Chiang Mai Univ., Thailand

8P-7-68

Development of Microfluidic Device Integrated with Pillar Structures Enabling Precise Volume Dispensing of Liquid Samples for Therapeutic Drug Monitoring

T. Komatsu, O. Wakao, M. Maeki, A. Ishida, H. Tani and M. Tokeshi, Hokkaido Univ., Japan

8P-7-69

3D Design and Binding Specificity of Peptide Aptamers for Multiparametric Cardio-Microarrays

V.V. Luchinin, V.A. Karasev, T.M. Zimina and A.I. Egorov, Saint Petersburg State Electrotechnical Univ., Russia

8P-7-70

Optimization of Electrospray-Based Droplet Display Technology for Compartmentalized in-Vitro Selection of Peptide Aptamers

K. Sharma 1, K. Nishigaki 2, Y. Takamura 1 and M. Biyani 1, 1 JAIST and 2 Saitama Univ., Japan

8P-7-71

Single-Cell Trapping Using Micropatterned Hydrogel for Morphological Analysis of Bacteria

J. Yoon and W. Park, Kyung Hee Univ., Korea

8P-7-72

Time Course Change of Clustered Circulating Tumor Cell in Cancer Metastasis Blood Investigated with Imaging Biomarkers by on-Chip Multi-Imaging Cell Sorter

M. Odaka 1,2, A. Hattori 1,2, K. Matsuura 1,2, M. Iwamura 3, Y. Yamanaka 3, K. Iida 1 and K. Yasuda 1, 1 Waseda Univ., Japan and 2 WABIOS, Singapore

8P-7-92L

Silver Ion Detection Methodology Using DNA Based Micro-Cantilever

K. Jang 1, C. Park 2, J. You 2, H. Park 2 and S. Na 2, 1 Hoseo Univ. and 2 Korea Univ., Korea

8P-7-93L

Electrical Current-Induced Failure Mechanism of Cu/Solder Ubump in Wafer Level Packages for BioMEMS Devices

K. Son, H. Ryu, G. Kim, Y.-B. Park, Andong Natl. Univ., Korea

8P-7-94L

Laboratory-on-a-Chip for Express-Identification and Antibiotic Susceptibility Testing of Microorganizms

V.V. Luchinin 1, T.M. Zimina 1, J.A. Gvozdev 1, N.A. Sitkov 1, V.N. Lemosersky 1, A.V. Soloviev 1, L.A. Kraeva 2, G.N. Hamdulaeva 2 , A.F. Kosko 3, 1 St. Petersburg State Electrotechnical Univ., 2 St. Petersburg Pasteur Inst. and 3 ITMO Univ., Russia

8P-7-95L

Characterization of Nanoparticle's Surface Based on the Analysis of Electrokinetic Phenomena

V. Majarikar, H. Takehara and T. Ichiki, Univ. of Tokyo, Japan

8P-7-96L

Relationships between Design and Actuation Range of Soft Magnetic Composites

J. Park, H. Lee and J. Kim, UNIST, Korea

 

8P-7-97L

Filter-Free Fluorescence Analysis System Integrated with Microfluidics Device

Y.J. Choi, K. Takahashi, T. Iwata and K. Sawada, Toyohashi Univ. of Technol., Japan

 

 

5: Microsystem Technology and MEMS

Chair:

8P-7-73

Pt-Coated X-Ray Micropore Optics Fabricated with Silicon Dry Etching and Atomic Layer Deposition

Y. Ezoe 1, K. Takeuchi 1, M. Numazawa 1, M. Terada 1, M. Fujitani 1, D. Ishi 1, A. Fukushima 1, R. Itoyama 1, R. Otsubo 1, T. Ohashi 1, K. Ishikawa 2, K. Mitsuda 2, and M.J. Sowa 3, 1 Tokyo Metropolitan Univ., 2 ISAS/JAXA, Japan and 3 Ultratech / CNT, USA

8P-7-74

The High Aspect Ratio Micro-Grating Structures by Precise Micromachining and Molding Process

Y.-H. Lin, C.-J. Weng, Y.-C. Cheng, N.-N. Chu, C.-C. Chen, M.-K. Wang, C.-N. Hsiao and M.-H. Shiao, Natl. Applied Res. Labs., Taiwan

8P-7-75

The Study of Boroflat Glass Molding Process with Micro-Structures by Hot Emboss Technology

M.-K. Wang, Y.-H. Lin, Y.-C. Cheng, N.-N. Chu and C.-N. Hsiao, Natl. Applied Res. Labs., Taiwan

8P-7-76

Magnetically Actuated Artificial Cilium with Similar 3D-Movement of Natural Cilium

R. Marume, F. Tsumori, K. Kudo and K. Shinagawa, Kyushu Univ., Japan

8P-7-77

Insulated Voltage Sensor Using Resonator Withstanding Higher Voltage

Y. Wada 1, N. Nobunaga 1, S. Kumagai 1, H. Ishihara 2, M. Ishii 2 and M. Sasaki 1, 1 Toyota Technol. and 2 Yazaki, Japan

8P-7-78

Development of High Frequency pMUT(Piezoelectric Micromachined Ultrasound Transducer) Based on Sputtered PZT

U. Lim, J. Yoo and K. Lee, Ajou Univ., Korea

8P-7-79

Development of Energy Harvesting System Using Deformation of Magnetic Elastomer

H. Shinoda, F. Tsumori, K. Tokumaru, K. Kudo and K. Shinagawa, Kyushu Univ., Japan

8P-7-80

Formation of Hierarchical Nanoporous Ag Films for Surface Enhanced Raman Scattering by Cluster Source Deposition Based on Sputtering

S. Yun 1,2, J. Lee 1, J. Yang 3, D. Lee 4, B. Kim 5 and C. Cho 1, 1 Kyungpook Natl. Univ., 2 Kwang-Lim Precision, 3 Yonsei Univ., 4 Yeungnam Univ. and 5 Catholic Univ. of Daegu, Korea

8P-7-81

Development of Fiber Coupling Thermal Microscope for Measuring Thermal Property in Micro-Scale Aarea

S. Miyake 1, K. Hattori 2, T. Otsuki 2 and M. Sekine 2, 1 Kobe City College of Technol. and 2 Bethel, Japan

8P-7-82

A Novel Joining Technique for Aluminum Foils by Using Al/Ni Exothermic Materials as Saving Heat Source

T. Izumi 1, N. Kametani 1, S. Miyake 1, S. Kanetsuki 2 and T. Namazu 2, 1 Kobe City of College of Technol. and 2 Aichi Inst. of Technol., Japan

8P-7-83

Fabrication and Application of Double-Side Notched Long Period Fiber Grating for Force Sensing

Y.-L. Fang 1, T.-H. Huang 1, C.-W. Wu 2 and C.-C. Chiang 1, 1 Natl. Kaohsiung Univ. of Applied Sci. and 2 Air Force Academy, Taiwan

8P-7-84

Bidirectional Hysteresis in Frequency Response of Arrayed Electrostatic MEMS Resonator

T. Tsuchiya, Y. Matsui, Y. Hirai and O. Tabata, Kyoto Univ., Japan

8P-7-98L

Profile Characterization and Temperature Effect on Wettability of Microstructured Surfaces

Y. Han 1, Y. Liu 2, M. Takato 1 and F. Uchikoba 1, 1 Nihon Univ. and 2 Xi'an Univ. of Technol., China

8P-7-99L

Photo-Induced Manipulation of Microspheres in PEG Solutions on Au Nanoisland Films

N. Chishiro, K. Namura and M. Suzuki, Kyoto Univ., Japan

8P-7-100L

Effect of Laser Irradiation Conditions on a Water Vapor Microbubble and Thermoplasmonic Marangoni Flow in Degassed Water

S. Imafuku, K. Namura and M. Suzuki, Kyoto Univ., Japan

8P-7-101L

High Temperature Wettability on Microstructrured Superhydrophobic Surface

Y. Liu 1 and Y. Han 2, 1 Xi'an Univ., China and 2 Nihon Univ., Japan

8P-7-102L

The Impact of Damping on Aluminum Nitride Piezoelectric MEMS Resonant Sensors

S.I. Jung, C. Ryu and H.J. Kim, Gyeongbuk Inst. of Sci. and Technol., Korea

8P-7-103L

Modeling of Multi-Mode Piezoelectric Cantilever Sensors for Liquid Property Analysis

C. Ryu, S.I. Jung and H.J. Kim, Daegu Gyeongbuk Inst. of Sci. and Technol., Korea

8P-7-104L

Polyurethane-Acrylate (PUA) Based Hydrophobic Film: Facile Fabrication, Characterization and Application

J. Park, C.R. Yu, A. Shanmugasundaram and D.-W. Lee, Chonnam Natl. Univ., Korea

8P-7-105L

A Parallel-kinematic Piezo-Driven Scanner for Improving Scan Speed of a Commercial Atomic Force Microscope

B.O. Alunda 1, Y.J. Lee 1 and S. Park 2, 1 Kyungpook Natl. Univ. and 2 Keimyung Univ., Korea

8P-7-106L

A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes

H. Niijima 1,3, M. Takayasu 1,3, D. Yamane 1,3, T. Konishi 1,2,3, T. Safu 2, H. Ito 1,3, S. Dosho 1,3, N. Ishihara 1,3, K. Machida 1,3 and K. Masu 1,3, 1 Tokyo Inst. of Technol., 2 NTT-AT and 3 JST-CREST, Japan

8P-7-107L

Micro Sample Chamber by laminated Fluorinated Films

for NMR Spectroscopy of a Micro-Volume Spherical Sample

T. Hizawa, M. Takahasi 2 and E. Iwase 1, 1 Waseda Univ. and 2 RIKEN, Japan

8P-7-108L

Measurement of Conformability and Adhesion Energy of Ultrathin Film to Skin Model

J. Sugano, T. Fujie 1,2, H. Iwata 1 and E. Iwase 1, 1 Waseda Univ. and 2 JST-PRESTO, Japan

8P-7-109L

Effect of Heater Geometry on the Sensitivity of a Thermal Convection-Based Tilt Sensor

J.K. Kim 1 , J.H. Kim 1,S.Y. Kwon 2, J.Y. Lee 2, D.G. Jung 2, S.H. Kong 2 and D. Jung 1, 1 KITECH and 2 Kyungpook Natl. Univ., Korea

8P-7-110L

High Sensitive Flexible Capacitive Pressure Sensor Based on a Three-Dimensional PDMS/Microsphere Sponge

Y. Jung 1,2, K.K. Jung 2,3, J.S. Ko 2 and H.C. Cho 1, 1 KITECH, 2 Pusan Natl. Univ. and 3 KOMERI, Korea

8P-7-111L

Optimal Design for a High-Frequency Plano-Convex Quartz Resonator

J. Ji 1, M. Zhao 1, H. Ohigawa 2 and T. Ueda 2, 1 Xidian Univ., China and 2 Waseda Univ., Japan

8P-7-112L

Room-Temperature Bonding of LiNbO3 and SiO2 Using Surface Activated Bonding

R. Takigawa, E. Higurashi and T. Asano, Kyushu Univ., Japan

8P-7-113L

Designing Ferromagnetic Shield Geometry with Magnetic Field Simulation to Improve Target Utilizaiton on DC Magnetron Sputtering

S.-H. Jang 1, S.-J. Park 1, K.-Y. Lee 2 and Y.-J. Kim 1, 1 Yonsei Univ. and 2 Samsung Display, Korea

Room A

Room B (Ramada Ballroom 2, 2F)

Room B

Room C (Ramada Ballroom 3, 2F)

Room C

Room D (Ramada Ballroom 4, 2F)

Room D

Room E (Seminar Room, 2F)

8A-8: 2D Nanodevices (15:40-17:50)

Chairs:

C.-H. Lee (Korea Univ.)

8B-8: Nanfabrication II (15:40-17:50)

Chairs:

G.H. Kim (KIMM)

S. Shingubara (Kansai Univ.)

8C-8: Electron and Ion Beam Technologies (15:40-18:10)

Chairs:

D. Jang (Seoul Natl. Univ.)

H.S. Kim (Sun Moon Univ.)

8D-8: Nano Tool (15:40-18:00)

Chairs:

K. Sugano (Kobe Univ.)

J. Lee  (Sogang Univ.)

8A-8-1

15:40

Light-Emitting Devices Based on Two-Dimensional van der Waals Materials (Invited)

Y.D. Kim 1,2, T. Taniguchi 3, K. Watanabe 3, T.F. Heinz 4, D. Englund 5 and J. Hone 2, 1 Kyung Hee Univ., Korea, 2 Columbia Univ., USA, 3 NIMS, Japan, 4 Stanford Univ. and 5 MIT, USA

8B-8-1

15:40

Scalable Nanoarchitecturing Via Hybrid Nanoassembly and Continuous Nanopatterning (Invited)

J.G. Ok, Seoul Natl. Univ. of Sci. and Technol., Korea

8C-8-1

15:40

Ultrafast Electron Microscopy: Principle and Applications (Invited)

O.-H. Kwon, UNIST, Korea

 

 

 

 

 

 

8D-8-1

15:40

(Invited)

J. Lee, Sogang Univ., Korea

8A-8-2

16:10

Tunneling Photocurrent Assisted by Interlayer Excitons in Staggered van der Waals Heterobilayers

D.H. Luong, H.S. Lee, G.P. Neupane, S. Roy, G. Ghimire, J.H. Lee, Q.A. Vu and Y.H. Lee, Sungkyunkwan Univ., Korea

8B-8-2

16:10

Micro Patterned Powder Metallurgy Technique for SOFC Electrolyte Using UV Curable Resin

T. Okabe 1, Y. Kim 2. Z. Jiao 2, N. Shikazono 2 and J. Taniguchi 1, 1 Tokyyo Univ. of Sci. and 2 Univ. of Tokyo, Japan

 

 

 

 

 

8C-8-2

16:10

(Invited)

Y.-S. Hwang, Seoul Natl. Univ., Korea

8D-8-2

16:10

(Invited)

M.K. Kwak, Kyungpook Natl. Univ., Korea

8A-8-3

16:30

Fabrication of p-type Monolayer WSe2 Field Effect Transistor

H.M. Oh, C. Park, S. Bang, S.J. Yun, Y.H. Lee and M.S. Jeong, Sungkyunkwan Univ., Korea

8B-8-3

16:30

Hf Layer Thickness Dependence of Resistive Swithcing Characteristics of Ti/Hf/HfO2/Au(Pt) ReRAM Device

R. Nakajima, A. Azuma, H. Yoshida, T. Shimizu, T. Ito and S. Shingubara, Kansai Univ., Japan

8C-8-3

16:40

Investigations on Advanced Process Calibration

S. Shimizu 1, G. Lopez 2,3, D. Shakarisaz 2, R. Bojko 2, N. Unal 2 and U. Hofmann 2, 1 GenISys, Japan, 2 GenISys, Germany and 3 Univ. of Pennsylvania, USA

8D-8-3

16:40

Laser Wavelength Measurement Using Gold Nanoparticle Aggregate Integrated Microresonator

K. Sugano 1, S. Joya 1, N. Arai 1, Y. Tanaka 1, E. Maeda 2, R. Kometani 2 and Y. Isono 1, 1 Kobe Univ. and 2 Univ. of Tokyo, Japan

8A-8-4

16:50

Quantum Dot Transport in Two-Terminal Devices on a Few Layers of ReS2

J. Park, J. Seo and M. Jung, DGIST, Korea

8B-8-4

16:50

Characterization of BaTiO3 Nanoparticles Formed in the Pores of Mesoporous Silica SBA-15 Thin Films

A. Kohno and T. Tajiri, Fukuoka Univ., Japan

8C-8-4

17:00

Simulation of Resist Exposure in Sub-10nm Ion Beam Lithography with FIB

S.I. Zaitsev and Y.L. Shabelnikova, Inst. of Microelectronics Technol. RAS, Russia

8D-8-4

17:00

Detection Characteristics of Strain of Ultra-Thin Silicon Structure by Raman Spectroscopy

R. Kometani, K. Okada and E. Maeda, Univ. of Tokyo, Japan

8A-8-5

17:10

Pushing the Subthreshold Swing to the Thermal Limit Using h-BN Dielectrics in Monolayer MoS2 Channel FETs

Q.A. Vu, S. Fan, S.H. Lee, M.-K. Joo, W.J. Yu and Y.H. Lee, Sungkyunkwan Univ., Korea

8B-8-5

17:10

Scanning Electron Beam Induced Deposition for Conductive Tip Modification

P.L. Chen 1, J. Su 1, M.H. Shiao 1, M.N. Chang 2, C.H. Lee 3 and C.W. Liu 3, 1 Natl. Applied Res. Labs., 2 Natl. Chung Hsing Univ. and 3 Natl. Taiwan Univ., Taiwan

8C-8-5

17:20

Computational SEM Metrology and Inspection

K. Arat 1, N. Unal 2, J. Bolten 3, C.W. Hagen 1, T. Klimpel 2, 1 Delft Univ. of Technol., The Netherlands, 2 GenISys and 3 AMO, Germnay

8D-8-5

17:20

Fabrication of an Electron Beam Deposited Tip for Atomic-Scale AFM Measurements in Liquid with a Small Cantilever

K. Miyazawa 1, H. Izumi 1, T. Watanabe-Nakayama 1 and T. Fukuma 1,2, 1 Kanazawa Univ. and 2 JST-ACT-C, Japan

8A-8-6

17:30

Development of P-N Diode Using Two Dimensional Nanomaterials

C. Park, N.T. Duong, S.H. Bang, D.A. Nguyen, Y.H. Lee and M.S. Jeong, Sungkyunkwan Univ., Korea

8B-8-6

17:30

Evaluation of Resistive Switching Properties of Si-Rich Oxide Embedded with Ti Nanodots by Applying Constant Voltage and Constant Current

A. Ohta, Y. Kato, M. Ikeda, K. Makihara and S. Miyazaki, Nagoya Univ., Japan

8C-8-6

17:40

Experimental Investigation of the Distribution of Energy Deposited by FIB in Ion-Beam Lithography

N. Gusseinov 1, M. Gabdullin 1, Y.L. Shabelnikova 2 and S.I. Zaitsev 2, 1 Al-Farabi Kazakh Natl. Univ., Kazakhstan

and 2 Inst. of Microelectronics Technol. RAS, Russia

8D-8-6

17:40

Localized Electroless Ag Plating at a Tip Apex for Scanning Kelvin Probe Microscopy

C.-T. Lin 1, M.-H. Yu 2, J. Su 1, P.-L. Chen 1, M.-H. Shiao 1 and M.-N. Chang 2, 1 Natl. Applied Res. Labs. and 2 Natl. Chung Hsing Univ., Taiwam

8A-8 Author's Interview:

17:50-18:00

8B-8 Author's Interview:

17:50-18:00

8C-8 Author's Interview:

18:00-18:10

8D-8 Author's Interview:

18:00-18:10

Room A (Ramada Ballroom 1, 2F)

18:30-20:30 Banquet

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Thursday, November 9

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

9A-9: Microsystem Technology and MEMS III (9:00-10:30)

Chairs:

C. Ji (Ewha Womans Univ.)

 

9B-9: Nanofabrication III (9:00-10:30)

Chairs:

D.J. Kang (SKKU)

A. Kohno (Fukuoka Univ.)

9C-9: Advanced Lithography I (9:00-10:10)

Chairs:

J. Miyazaki (ASML)

9D-9: Bio MEMS and Lab on a Chip I (9:00-10:10)

Chairs:

A. Matsumoto (Tokyo Medical and Dental Univ.)

K.M. Byun (Kyung Hee Univ.)

9A-9-1

9:00

Recent Advancement on Low Loss Metaconductor Technology for Energy Efficient 5G and Millimeter Wave Appications(Invited)

Y.-K. Yoon, S. Hwangbo, T. Clingenpeel and A. Rahimi, Univ. of Florida, USA.-K. Yoon, Univ. of Florida, USA

9B-9-1

9:00

Effect of Photo-Illumination on Gold Nano-Particles Assisted Chemical Etching of Silicon

Y.-S. Lin 1, C.-P. Lai 1, Y.-H. Lin 2, N.-N. Chu 2, C.-T. Lin 2, C.-L. Hsieh 2, C.-N. Hsiao 2 and M.-H. Shiao 2, 1 Natl. United Univ. and 2 Natl. Applied Res. Labs., Taiwan

9C-9-1

9:00

EUV High Volume Manufacturability (Invited)

Y.S. Kang, Samsung Electronics, Korea

9D-9-1

9:00

Single Particle Tracking Analysis of Extracellular vesicles Down to 30 nm in a Microfluidic Chip

T. Akagi 1,2, R. Okamura 1, H. Kishita 1, M. Nakakuki 1 and T. Ichiki 1,2, 1 Univ. of Tokyo and 2 iCONM, Japan

9A-9-2

9:30

Fabrication of Three-Dimensional Integrated CMOS Image Sensors with Quarter VGA Resolution by Pixel-Wise Direct Bonding Technology

M. Goto 1, Y. Honda 1, T. Watabe 1, K. Hagiwara 1, M. Nanba 1, Y. Iguchi 1, T. Saraya 2, M. Kobayashi 2, E. Higurashi 2, H. Toshiyoshi 2 and T. Hiramoto 2, 1 NHK Sci. and Technol. Res. Lab., and 2 Univ. of Tokyo, Japan

9B-9-2

9:20

Preliminary Study of Fabrication of Ag-Ag2S Nanoparticles and Random Network for Reservoir Computing

Hadiyawarman 1, Y. Amano 1, M. Eguchi 2 and H. Tanaka 1, 1 Kyushu Inst. Technol. and 2 Fuzzy Logic Inst., Japan

9C-9-2

9:30

Patterning Performance Improvement in EUV Lithography Through Process Optimization

S. Park, M. Lim, I. Lee, H. Kim, K. Kim and C.-M. Lim, SK hynix, Korea

9D-9-2

9:20

Sensitive Voltage Sensitive Dye Imaging in Living Neuronal Network on Bull's Eye-Plasmonic Chips

W. Minoshima 1, S. Izumi 1, C. Hosokawa 1,2, S.N. Kudoh 1 and K. Tawa 1,2, 1 Kwansei Gakuin Univ. and 2 AIST, Japan

9A-9-3

9:50

5 MHz Pn-Diode Resonator with In-Plane Longitudinal Extensional Mode

F. Miyazaki, K. Baba, H. Tanigawa, T. Furutsuka and K. Suzuki, Ritsumeikan Univ., Japan

9B-9-3

9:40

Multi-Functional Core/Shell Nanoparticles Fabricated by Atomic Layer Deposition Technology

S. Seong, Y.C. Jung, T. Lee, I.-S. Park, K. Yoo, S. Lee and J. Ahn, Hanyang Univ., Korea

9C-9-3

9:50

3-Dimensional Photolithography

D. Sugihara, H. Kikuta, H. Kawata, M. Yasuda, M. Sasago and Y. Hirai, Osaka Pref. Univ., Japan

9D-9-3

9:40

(Invited)

H.-N. Kim, KIST, Korea

9A-9-4

10:10

Selective Molecular Detection on a Suspended Graphene Developed by Low-Pressure Dry Transfer Technique

S. Kidane 1, H. Ishida 1, K. Sawada 1 and K. Takahashi 1,2, 1 Toyohashi Univ. of Technol. and 2 JST-PRESTO, Japan

9B-9-4

10:00

Effective Excitation of Copper Surface Plasmon Resonance and Its Applications (Invited)

K. Sugawa, Nihon Univ., Japan

9A-9  Author's Interview:

10:30-10:40

9B-9 Author's Interview:

11:50-12:00

9C-9 Author's Interview:

11:40-11:50

9D-9  Author's Interview:

11:40-11:50

Convention Lobby (2F)

Coffee Break

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

9A-10: Inorganic Nano Materials II (10:50-12:00)

Chairs:

D.H. Kim (Chungbuk Natl. Univ.) M. Suzuki (AIST)

9B-10: Nanofabrication IV (10:50-11:50)

Chairs:

H. Tanaka (Kyushu Inst. of Technol.)

9C-10: Advanced Lithography II (10:30-11:50)

Chairs:

S.-S. Kim (Samsung Electronics)

J. Miyazaki (ASML)

9D-10: Bio MEMS and Lab on a Chip II (10:30-11:40)

Chairs:

K. Furukawa (Meisei Univ.)

W. PARK  (Kyung Hee Univ.)

9A-10-1

10:50

Recent Progress of Droplet Epitaxy to Form Type-II Quantum Ring Nanostructures (Invited)

J.S. Kim 1, V. Dahiya 2,3, M. Zamiri 3,4, S. Krishna 2,3 and S.J. Lee 5, Yeungnam Univ., Korea, 2 Ohio State Univ., 3 Univ. of New Mexico, 4 Univ. of Wisconsin, USA and 5 Korea Res. Inst. of Standards & Sci., Korea

9B-10-1

10:50

Investigation of Piezoresistive Effect in PMOSFETs Fabricated on Circular SOI Diaphragms Using Minimal ICP-RIE and Mask Aligner

Y.X. Liu, H. Tanaka, N. Umeyama, S. Khumpuang, M. Nagao, T. Matsukawa and S. Hara, AIST, Japan

 

 

9C-10-1

10:30

Does Litho Need MI’s Help? (Invited)

B.-H. Lee, SK Hynix, Korea

9D-10-1

10:30

Programming Anisotropy in Soft Materials Using Magnetic Self-Assembly for Bioapplications (Invited)

J. Kim, UNIST, Korea

9A-10-2

11:20

Coupling Effect Characteristics of In0.4Ga0.6AS/GaAs Multi-Stacked Quantum Dots without Straion Balancing Technique

K. Goshima 1, N. Tsuda 1, K. Inukai 1, K. Komori 2 and T. Sugaya 2, 1 Aichi Inst. of Technol. and 2 AIST, Japan

9B-10-2

11:10

Composition Control of InGaAs Nanowires on Ge(111) Substrates by Selctive-Area Growth

A. Yoshida, K. Chiba, Y. Minami, K. Tomioka and J. Motohisa, Hokkaido Univ., Japan

9C-10-2

11:00

Characteristics of Silicon Nitride Composites for EUV Pellicle Application

Y.J. Jang, J.H. Kim, I.S. Kim, S.G. Lee, H.K. Oh and J. Ahn, Hanyang Univ., Korea

9D-10-2

11:00

An Elastomer-Based MEMS Fabry-Perot Interferometric Biosensor with Open-Cavity Structure

R. Teramoto 1, S. Maruyama 1, I. Takahashi 2, S. Takeoka 2, T. Fujiie 2,3, K. Sawada and K. Takahashi 1,3, 1 Toyohashi Univ. of Technol., 2 Waseda Univ. and 3 JST-PRESTO, Japan

9A-10-3

11:40

Effect of The Particle Size on The Magnetic and Electric Properties of Free Standing La2-xSrxCuO4 and La2CuO4+y Nanoparticles

F. Budiman 1, Y. Horibe 1, M. Eguchi 2 and H. Tanaka 1, 1 Kyushu Inst. of Technol. and 2 Fuzzy Logic Systems Inst., Japan

 

9B-10-3

11:30

Confinement Effect on I-V Characteristics of Resistive Change Memory Using Oxide Nanowire

T. Aono 1, K. Sugawa 1, T. Shimizu 2, S. Shingubara 2 and K. Takase 1, 1 Nihon Univ. and 2 Kansai Univ., Japan

9C-10-3

11:20

Feasibility of Multi-Stack EUV Pellicle Membrane for EUV Non-Actinic Mask Inspection System Using DUV Wavelength

S.-G. Lee and H.-K. Oh, Hanyang Univ., Korea

9D-10-3

11:20

Laboratory-on-a-Chip for Express-Identification and Antibiotic Susceptibility Testing of Microorganizms

V.V. Luchinin 1, T.M. Zimina 1, J.A. Grozdez 1, N.A. Sitkov 1, V.N. Lemosersky 1, A.V. Soloviev 1, L.A. Kraeva 2, G.N. Hamdulaeva 2 and A.F. Kosko 3, 1 St. Petersburg State Electrotechnical Univ., 2 ST. Petersburg Pasteur Inst. and 3 St. Petersburg State

9A-10  Author's Interview:

12:00-12:10

9B-10 Author's Interview:

11:50-12:00

9C-10 Author's Interview:

11:40-11:50

9D-10  Author's Interview:

11:40-11:50

Lunch

Room A (Ramada Ballroom 1, 2F)

Room B (Ramada Ballroom 2, 2F)

Room C (Ramada Ballroom 3, 2F)

Room D (Ramada Ballroom 4, 2F)

9A-11: Inorganic Nano Materials III (13:30-15:00)

Chairs:

M. Osada (NIMS)

K. Kyhm (Pusan Natl. Univ.)

9B-11: Nanofabrication V (13:30-14:50)

Chairs:

A. Kohno (Fukuoka Univ.)

G.H. Kim (KIMM)

9C-11: Advanced Lithography III (13:30-14:50)

Chairs:

C. Lim (SK Hynix)

T. Uchiyama (Toshiba Memory)

9D-11: Bio MEMS and Lab on a Chip III (13:30-14:30)

Chairs:

T. Akagi (Univ. of Tokyo )

 

9A-11-1

13:30

Spin Dynamic of Ferromagnetic Nano- Multilayer Films over Wide Ranges of Timescale (Invited)

D.-H. Kim, Chungbuk Natl. Univ., Korea

9B-11-1

13:30

Nanorods and Nanopores Fabricated by Liquid Crystalline Block Copolymer

T. Iyoda, Doshisha Univ., Japan

9C-11-1

13:30

EUV Lithography Industrialization and Technology Progress (Invited)

J. Finders, ASML, The Netherland

9D-11-1

13:30

Development of Ceramic Three-Dimensional Micro Channel by Combined Process of Laser Processing and Imprinting

K. Tokumaru, S. Hunt, F. Tsumori, K. Kudo and K. Shinagawa, Kyushu Univ., Japan

9A-11-2

14:00

Electron Transport Calculation of Nanocrystalline Bi2Te3 Thin Films by Oblique Deposition Method

S. Morikawa, Y. Satake and M. Takashiri, Tokai Univ., Japan

9B-11-2

13:50

Solvent-Assisted Universal Transfer for 2D Layered Materials

I. Gasparutti, S. Song and Y.H. Lee, Sangkyunkwan Univ., Korea

9C-11-2

14:00

Using Platinum for Absorber Stack of Phase Shift Mask in High Numerical Aperture Extreme Ultraviolet Lithography

J.S. Kim, D.G. Woo and J. Ahn, Hanyang Univ., Korea

9D-11-2

13:50

Blast-Induced Intracranial Brain Deformation Sensor

S. Song 1, N. Race 2, A. Kim 3, T. Zhang 2, R. Shi 2 and B. Ziaie 2, 1 Sngkyunkwan Univ., Korea, 2 Purdue Univ. and 3 Temple Univ., USA

9A-11-3

14:20

A Novel and Facile Route to Synthesize Atomic-Layered MoS2 Film for Large-Area Electronics

S. Boandoh 1, S.M. Kim 2 and K.K. Kim 1, 1 Dongguk Univ. and 2 KIST, Korea

9B-11-3

14:10

Formation of Silicon Nanoporous and Silicon Nanowires on V-groove Textured Silicon Using Metal Assisted Chemical Etching Method

M.K.N. Azmi 1, Y. Nakajima 2, T. Maekawa 2 and A.M. Hashim 1, 1 Univ. Teknologi Malaysia, Malaysia and 2 Toyo Univ., Japan

9C-11-3

14:20

Thermal and Structural Deformation of Extreme Ultraviolet Mask by Exposure

C.-H. Ban, E.-S. Park, J.-H. Park and H.-K. Oh, Hanyang Univ., Korea

9D-11-3

14:10

Magnetic Beads Based Local Enzyme Immobilization Method for Multi-Neurotransmitter Image Sensor with Microhole Array Structure

Y. Ogaeri, M. Mitsudome, Y.-N. Lee, T. Iwata, K. Takahashi and K. Sawada, Toyohasi Univ. of Technol., Japan

9A-11-4

14:40

First-Principles Simulation on Thermoelectric Properties in Transition Metal Dichalcogenide Monolayers

K. Nakamura 1,2, 1 Kyoto Univ., Japan and 2 Egypt-Japan Univ. of Sci. and Technol., Egypt

9B-11-4

14:30

Fabrication of MoS2 Quantum Dots by High Power Femtosecond Laser Irradiation

S.-J. An, S. Bang, D.Y. Park, N.D. Anh, J.-H. Kim, H.Y. Kim, H.J. Jeong and M.S. Jeong, Sangkyunkwan Univ., Korea

 

9A-11 Author's Interview:

15:00-15:10

9B-11 Author's Interview:

14:50-15:00

9C-11 Author's Interview:

14:40-14:50

9D-11 Author's Interview:

14:30-14:40

Convention Lobby (2F)

9P-12: 15:20-17:20 POSTER SESSION II

1-1: Advanced Photolithography

Chair: S. Kim (Ajou Univ)

9P-12-1

Timing Aware Advanced Retargeting

P. Mantripragada 1, A. Mampazhy 1, B. Sayah 2, S. Mandal 3, 1 GlobalFoundries Eng., India, 2 GlobalFoundries, USA and 3 Maxlinear Technologies, India

9P-12-2

Selective Defocus Grey-Scale Mask to Address Local Bridging and Pinch-off Issues

S. Srivatsa 1, M. Ghosal 1, A. Mampazhy 1, I. Stobert 2, R. Viswanathan 2 and M. Gheith 2, 1 GlobalFoundries Eng., India and 2 GlobalFoundries, USA

9P-12-3

Thermo-Mechanical Analysis of the Extreme Ultraviolet Pellicle with the Residual Stress

E.-S. Park, C.-H. Ban, J.-H. Park and H.-K. Oh, Hanyang Univ., Korea

9P-12-4

Lithography Simulation and OPC for Next Generation Display Technology

N. Taksatorn 1, K. Yoshida 2, N. Unal 1, GenISys, Germany and 2 Hoya, Japan

2-1 Nanocarbons

Chair: 

9P-12-5

Effect of Various Surfactants on Morphology of Cu/SWCNT Electroplating Films

M. Shimizu, T. Ogasawara and S. Arai, Shinshu Univ., Japan

9P-12-6

Surface Morphology Changes of CVD-Graphene/Cu{120} Induced by Post-Annealing Processes

Y. Ogawa 1, Y. Murata 2, S. Suzuki 1, H. Hibino 1,3, S. Heun 2, K. Kumakura 1, 1 NTT, Japan and 2 NEST, Italy and 3 Kwansei Gakuin Univ., Japan

9P-12-7

Chemical Vapor Deposition Based Rapid Graphene Growth System

K.P. Sharma, G. Kalita and M. Tanemura, Nagoya Inst. of Technol., Japan

9P-12-8  Withdrawn

9P-12-9

Investigation on Mo1-xWxS2 Fabricated by Co-Sputtering and Post-Deposition Sulfurization with (t-C4H9)2S2

Y. Hibino 1, S. Ishihara 1,4, N. Sawamoto 1, T. Ohashi 2, K. Matsuura 2, H. Machida 3, M. Ishikawa 3, H. Sudoh 3, H. Wakabayashi 2 and A. Ogura 1, 1 Meiji Univ., 2 Tokyo Inst. of Technol., 3 Gas-Phase Growth and 4 JSPS, Japan

9P-12-10

Joule Heat Induced Synthesis and Nanosoldering of Carbon Nanotubes in Insitu TEM

S. Sharma, G. Kalita and M. Tanemura, Nagoya Inst. of Technol., Japan

9P-12-11

GAS Sensor Using a Carbon Nanotube Yarn to Detect Acetylene Molecules

J.K. Kim 1, S.Y. Kwon 2, J.Y. Lee 2, D.G. Jung 2, S.H. Kong 2 and D. Jung 1, 1 KITECH and 2 Kyungpook Natl. Univ., Korea

9P-12-12  Withdrawn

9P-12-13

Photoresponse of Graphene FET with n-type Si Schottky Gate

S. Kobayashi, Y. Anno, K. Takei, T. Arie and S. Akita, Osaka Pref. Univ., Japan

9P-12-56L

Atmospheric-Pressure-Plasma-Jet Processed Reduced Graphene Oxides and Carbon Nanotubes for Supercapacitor Application

F.-H. Kuok, C.-W. Chen, I-C. Cheng, C.-C. Hsu and J.-Z. Chen, Natl. Taiwan Univ., Taiwan

9P-12-57L

Stack Angle Dependency of Interlayer Excitons in MoSe2/WSe2 van der Waals Heterostructures

P.K. Nayak 1, Y. Horbatenko 2, S. Ahn 2, G. Kim 2, J.-U. Lee 3, K.Y. Ma 2, A-R. Jang 2,4, H. Lim 5, D. Kim 6, S. Ryu 6, H. Cheong 3, N. Park 2, and H.S. Shin 2, 1 Indian Inst. of Technol. Madras, India, 2 Ulsan Natl. Inst. of Sci. and Technol., 3 Seogang Univ., Korea, 4 Oxford Univ., UK, 5 Chonnam Natl. Univ. and 6 POSTECH, Korea

9P-12-58L

Electronic Structure of Graphene/h-BN Monolayer on Fe Substrate

N.T. Cuong, NIMS, Japan

9P-12-59L

Impact of Small Amount of Ni Atoms on Contact Resistance in Metal-Graphene System

X. Yin and S. Kasai, Hokkaido Univ., Japan

 

 

 

2-2: Nanodevices

Chair: W.S. Hwang (Korea Aerospace Univ.) 

9P-12-14

Gate-Modulated Charge Transport and Photo-Induced Current in van Der Waals Heterostructures with Strong Interfacial Coupling

M.-H. Doan, Y. Jin, J. Zhao and Y.H. Lee, Sungkyunkwan Univ., Korea

9P-12-15

Role of Hole Trap Sites in MoS2 for Inconsistent Optical and Electrical Phenomena

M.D. Tran, J.-H. Kim, H. Kim, M.H. Doan, D.L. Duong and Y.H. Lee, Sungkyunkwan Univ., Korea

9P-12-16

DC and RF Performance Comparison of p-i-n TFET and p-n TFET

Y.J. Yoon, J.H. Seo, J.-H. Lee and I.M. Kang, Kyungpook Natl. Univ., Korea

9P-12-17

Highly Sensitive pH Sensor Using NiO Nanosheets Sensing Electrode and Extended-Gate Field-Effect Transistor

C.-Y. Kuo, H.-H. Tseng, R.-M. Ko and S.-J. Wang, Natl. Cheng Kung Univ., Taiwan

9P-12-18

Flexible Piezoelectric Nanogenerators Integrated with ZnO Nanoflowers/PDMS Composite Films

D.H. Kim, B. Dudem and J.S. Yu, Kyung Hee Univ., Korea

9P-12-19

Evaluation of Optical Properties of Bismuth Telluride Nanoplate Thin Films

K. Wada, K. Tomita and M. Takashiri, Tokai Univ., Japan

9P-12-20

Evaluation of Electrical Characteristics of V-Grooved FETs Using One-Dimensional Array of Gold Nanoparticles

T. Ban 1, M. Uenuma 2, S. Migita 3, I. Yamashita 2, Y. Uraoka 2, S. Yamamoto 1, 1 Ryukoku Univ., 2 NAIST and 3 AIST, Japan

9P-12-21

A Study on the Resistance Switching of Ag2Se and Ta2O5 Heterojunctions Using Structural Engineering

T.-S. Lee, N.-J. Lee, Q. Hu, H. Abbas, T.-S. Kang, T.-S. Yoon and C.-J. Kang, Myongji Univ., Korea

 

9P-12-22

Electrical Properties of SiO2 Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

M.-W. Ha 1, K. Choi 1, D.H. Kim 2 and T.J. Park 1,2, 1 Myongji Univ. and 2 Hanyang Univ., Korea

9P-12-23

Fabrication of Transparent FTO/ZnO/PEDOT:PSS Solar Cells

H. Naganuma 1, A. Mori 1, C. Takada 1, S. Komuro 2 and X. Zhao 1, 1 Tokyo Univ. of Sci. and 2 Toyo Univ, Japan

9P-12-24

Atomic Layer Deposited SiO2/4H-SiC Metal Oxide Semiconductor Using Ar Post-Deposition Annealing

S. Lee 1, H. Kim 1, H.J. Kang 1, M.-W. Ha 2 and H.J. Kim 1, 1 Seoul Natl. Univ. and 2 Myongji Univ., Korea

 

 

9P-12-25

Development of Optimized Annealing Method for Graphene Source/Drain Electrodes in In-Ga-Zn-O Thin-Film Transistors Using Microwave Irradiation

E.-K. Hong and W.-J. Cho, Kwangwoon Univ., Korea

9P-12-26

Evaluation of Carrier Transport Mechanism in Long P3HT Molecular Wire Using Graphene Nanogap Electrodes

T. Ikuta 1,2, S. Tamba 2, K. Inoue 2, Y. Ie 2, Y. Aso 2, K. Matsumoto 2 and K. Maehashi 1,2, 1 Tokyo Univ. of Agriculture and 2 Osaka Univ., Japan

9P-12-27

Write-Once-Read-Many-Times Switching Behaviors of One Diode–One Resistor Nonvolatile Organic Memory Devices Based on Inorganic Schottky Diodes and Hybrid Nanocomposites

S. Sung, C. Wu and T.W. Kim, Hanyang Univ., Korea

9P-12-28

Extraction of Subgap State Density in IGZO Thin-Film Transistors by Transmission Line Model Incorporated Conductance Method

M.C. Nguyen 1, A.H.-T. Nguyen 1, J. Kim 1, S.-W. Kim 1, S.-J. Choi 1, J.-K. Jun 1, H.M. Ji 1, J.-H. Kim 1, K.M. Yu 1, J.K. Jeong 2 and R. Choi, 1 Inha Univ. and 2 Hanyang Univ., Korea

9P-12-29

Design of Multi-Layer Single-Electron Information-Processing Circuit for Nonlinear Problem Mimicking Foraging Behavior of Honeybees

T. Tanabe and T. Oya, Yokohama Natl. Univ., Japan

9P-12-60L

Effects of Trench Profile and SiO2 Spacer on Trench Sidewall 1.2 kV 4H-SiC Trench MOSFETs Employing Bottom Protection Well

O. Seok 1, M.-W. Ha 2, I.H. Kang 1, H.W. Kim 1, D.Y. Kim 1,3 and W. Bahng 1, 1 Korea Electrotechnol. Res. Inst., 2 Myongji Univ. and 3 Gyeongsang Natl. Univ., Korea

9P-12-61L

Hybrid Black Phosphorus-Quantum Dots Phototransistors

A.-Y. Lee 1, H.-S. Ra 1, D.-H. Kwak 1, M.-H. Jeong 1, J.-H. Park 1, Y.-S. Kang 1, W.-S. Chae 2, J.-S. Lee 1, 1 DGIST and 2 Korea Basic Sci. Inst., Korea

9P-12-62L

High Peak-to-Valley Current Ratio Tunnel Diodes with Chemically Doped MoTe2/MoS2 Heterostructure

N.T. Duong, S.H. Bang, D.X. Dang, Y.H. Lee, S.C. Lim and M.S. Jeong, Sungkyunkwan Univ., Korea

9P-12-63L

Scaling of Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films for Nextgeneration FRAM Applications

S.J. Kim 1, J. Mohan 1, S.R. Summerfelt 2, T. San 2, L. Colombo 2 and J. Kim 1, 1 Univ. of Texas and 2 Texas Instruments, USA

9P-12-64L

Characteristics of the Nano Structured P-I-N Gate FinFET for 1T DRAM

S.-I. Kim 1, Y.T. Kim 1, C.K. Kim 1 and F. Gamiz 2, 1 KIST, Korea and 2 Univ. of Granada, Spain

9P-12-65L

Memory Performance of Z2-FET Fabricated on 7nm SOI Substrate

Y.T. Kim 1, S. Kwon 1,2, M. Choi 2, P. Galy 3 and J. Ahn 2, 1 KIST, 2 Hanyang Univ. and 3 ST Microelectronics, Korea

9P-12-66L

Fabrication of Hybrid Quantum Dots/Monolayer MoS2 Photodetector

S. Cho, H. Woo, J. Kim, Y. Jo, S. Lee, J. Seo, H. Kim and H. Im, Dongguk Univ., Korea

9P-12-67L

Improving Electrochromic and Electrochemical Energy Storage properties in WOx with an Embedded Metallic Nanofilaments array

J. Kim, S. Lee, S. Cho, Y. Jo, H. Woo, H. Kim and H. Im, Dongguk Univ., Korea

9P-12-68L

Gate-Tunable 2D Memristor Devices Based on Monolithically-Integrated Heterojunctions

W. Huh 1, S.H. Jang 1, J.Y. Lee 1, D. Lee 1, H.Y. Jeong 2, G. Wang 1, C.-H. Lee 1, 1 Korea Univ. and 2 UNIST, Korea

9P-12-69L

Improvement of Out-Coupling Efficiency in Organic Emitting Diodes using TiO2 micro to nano structures

P.-H. Jung , Y.H. Sung, S.J. Kim, Y. Kim, W.-J. Kim and H. Lee, Korea Univ., Korea

9P-12-70L

Workfunction Engineering of Pocket Tunnel Field-Effect Transistor with Dual Material Gate

J.C. Lee, T.J. Ann and Y.S. Yu, Hankyong Natl. Univ., Korea

 

2-3: Nanofabrication

Chair: 

9P-12-30

Fabrication of Hierarchical-Architectured Silicon with Superior Antireflective and Self-Cleaning Ability for Photovoltaics Applications

B. Dudem, J.W. Leem and J.S. Yu, Kyung Hee Univ., Korea

9P-12-31

Direct Laser Writing Using a CW Laser Diode for Microstructures in a Microchannel

D. Jung 1, G.-H. Kim 1,2, K. Choi 1,2, S. Kwon 2, S. Lee 2, J. Lee 1,2 and H. Lim 1,2, 1 UST and 2 KIMM, Korea

9P-12-32

Size Effects on Optical Properties of CdSe and CdSe/CdS Nanoheterostructures

S.H. Kim, M.T. Man and H.S. Lee, Chonbuk Natl. Univ., Korea

9P-12-33

Surface-Enhanced Raman Scattering Based on Hybrids Consisting of Plasmonic Silver Arrays-Satellite Ag Prisms

W. Inoue, H. Takeda, K. Sugawa, K. Takase and J. Otsuki, Nihon Univ., Japan

9P-12-34

Plasmonic Structure on GaAs Substrate by 3-Dimensional Finite-Difference Time-Domain Method

G. Oh and E.K. Kim, Hanyang Univ., Korea

9P-12-35

Fabrication of High Conductivity of TTF-F4TCNQ Charge Transfer Complexes with High Crystallinity by Eutectic Melting Method

J. Kim 1,2, S. Kwon 1, Y. Kang 2 and J. Lee 1, 1 KIMM and 2 Hanyang Univ., Korea

9P-12-36 Withdrawn

 

9P-12-37  Withdrawn

Synthesis of NiNW/ Cellulose Hybrid Structure and Their Adsorption Behavior

S.R. Shmsuri 1, S. Shiomi 2 and E. Matsubara 1, 1 Kyoto Univ. and 2 Kyoto Municipal Inst. of Industrial Technol. and Culture, Japan

9P-12-38

Investigation of Surface Potentials in Reduced Graphene Oxide Flake by Kelvin Probe Force Microscopy

R. Negishi, K. Takashima and Y. Kobayashi, Osaka Univ., Japan

9P-12-39

Effects of Stacked Layers on Optical Properties in Multilayer Quantum Dots

S.H. Ju 1, J.C. Choi 1 and H.S. Lee 2, 1 Yonsei Univ. and 2 Chonbuk Natl. Univ., Korea

9P-12-40

Structural and Optical Properties of CdTe/ZnTe Quantum Dots on Si Substrates

K.H. Lim 1, J.C. Choi 1 and H.S. Lee 2, 1 Yonsei Univ. and 2 Chonbuk Natl. Univ., Korea

9P-12-71L

Synthesis of MO1-xWxS2 on CNT Yarn for High Performance Freestanding Electrode Hydrogen Evolution Reaction

D.A. Nguyen, T.S. Le, D.S. Suh and M.S. Jeong, Sungkyunkwan Univ., Korea

9P-12-72L

Synthesis of Ni Nanowire/ Cellulose Hybrid Structure via Liquid Phase Reduction

S.R. Shamsuri 1, S. Shiomi 2 and E. Matsubara 1, 1 Kyoto Univ. and 2 Kyoto Municipal Inst. of Industrial Technol. and Culture, Japan

 

 

 

2-4: Inorganic Nanomaterials

Chair: J.S. Kim (Yeungnam Univ.)

9P-12-41

Preparation and Characterization of Alginate Based-Magnetic Nanoparticles for Fluorescence/Magnetic Resonance Multimodal Imaging Applications

Y.-S. Kwon 1,2, E.-J. Won 2, K.-B. Choi 1, T.-J. Yoon 2 and J.-J. Lee 1, 1 KIMM and 2 Ajou Univ., Korea

9P-12-42

Fabrication of ZnO-ZnS@polyaniline Nanohybrid on FTO Glass for Enhanced Hydrogen Generation

A. Brayek, H. Kim and B. Yang, Kumoh Natl. Inst. of Technol., Korea

9P-12-43

What is the Band Offsets of PANI/ZnS/ZnO Heterojunctions ?

A. Brayek, H. Kim and B. Yang, Kumoh Natl. Inst. of Technol., Korea

9P-12-44

Two-Dimensional Vertical Heterostructure for Efficient Bandgap Modulation of Black Phosphorus

T. Eum, S. Song, M. Neumann, D.S. Chung and Y.H. Lee, Sungkyunkwan Univ., Korea

9P-12-45

Toward Ultraclean 2D Heterostructure Interfaces: h-BN As a Novel Tool to Visualize Organic Residues

X. Wei, M. Neumann, S.H. Song and Y.H. Lee, Sungkyunkwan Univ., Korea

9P-12-46

Tuning of the Optical Properties of Self-Assembled InAs/GaAsSb Quantum Dots Using InAs Stressor Layers

Y. Kim, J.O. Kim, S.K. Noh and S.J. Lee, Korea Res. Inst. of Standards and Sci., Korea

9P-12-47

Optical Transitions of Organic-Inorganic Perovskite Crystals under Pulsed Magnetic Fields

Y. Kim 1, Y.H. Shin 1, M.S. Jeong 2, Y. Kohama 3 and H. Nojiri 4, 1 Dankook Univ., 2 Sung Kyun Kwan Univ., 3 Univ. of Tokyo and 4 Tohoku Univ., Japan

9P-12-48

Low Temperature Growth of High Quality GaN Barrier for an InGaN/GaN Multiple Quantum Well Structure

H. Woo 1,2, J. Kim 2, S. Cho 2, Y. Jo 2, C.H. Roh 1, J.H. Lee 1, J. Park 3, H. Kim 2, H. Im 2 and C.-K. Hahn 1, 1 Korea Electronics Technol. Inst., 2 Dongguk Univ. and 3 Korea Univ., Korea

9P-12-49

Enhanced Photocatalytic Degradation of Volatile Organic Compounds by the Hybridization of B-Ga2O3 and Reduced Graphene Oxide

H.J. Bae, S. Kim, I.G. Lee and W.S. Hwang, Korea Aerospace Univ., Korea

9P-12-50

Optical Imaging of Two-Dimensional MoS2

H. Kim 1, S.M. Kim 2 and H. Rho 1, 1 Chonbuk Natl. Univ. and 2 KIST, Korea

9P-12-51

Solution-Processed High-κ Dielectrics for Low-Operating Voltage Organic and Inorganic Field-Effect Transistors

S.Y. Park, J. Heo, J. Kim, S. Song, Y.J. Yoon, J. Jung, H. Jang, K.T. Lee, J. Seo, B. Walker and J.Y. Kim, UNIST, Korea

9P-12-52

Enhanced Polarization and Leakage Current Properties for Bismuth Titanate Ceramic Films Prepared by Aerosol Deposition Method

M. Suzuki, T. Tsuchiya and J. Akedo, AIST, Japan

9P-12-53

Exploring Transparent Metal and Metal-Oxide Material for Transparent Cathode in Highly Efficient Transparent OLEDs

B.H. Choi and J.H. Lee, KITECH, Korea

9P-12-54

Optical Characterization of AlGaAs/GaAs Multiple Quantum Wells

J. Cho 1, L. Ali 1, J.D. Song 2, J.S. Kim 3, H.-J. Jo 3, H. Kim 4, J.-H. Kim 4, M.S. Jeong 4 and C.C. Byeon 1, 1 Kyungpook Natl. Univ., 2 KIST, 3 Yeungnam Univ. and 4 Sungkyunkwan Univ., Korea

9P-12-55

Surface Modifications of Titanium Oxide Thin Films by Plasma Treatment

J.-S. Kim, H. Jeek and H.-W. Seo, Jeju Natl. Univ., Korea

9P-12-73L

Ag Nanowire Embedded Flexible Transparent Electrode

C.S. Kim, KIMS, Korea