Scope

  1. Lithography, and Related Technologies
    1-1: Advanced Photolithography 1-2: Electron and Ion Beam Technologies
    1-3: Resist and Directed Self-Assembly
  2. Nanotechnology
    2-1: Nanocarbons 2-2: Nanodevices
    2-3: Nanofabrication 2-4: Inorganic Nanomaterials
    2-5: Organic Nanomaterials 2-6: NanoTool
  3. Nanoimprint, Nanoprint and Rising Lithography
  4. BioMEMS, Lab on a Chip
  5. Microsystem Technology and MEMS